Fabrication Of Mesoscale Energy Storage Systems By Laser Direct-Write
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Fabrication Of Mesoscale Energy Storage Systems By Laser Direct-Write Craig B. Arnold1, Ryan C. Wartena2, Karen E. Swider-Lyons2, Alberto Piqué1 1 Code 6372 and 2Code 6171 Naval Research Laboratory Washington, DC. 20375, USA
ABSTRACT Over the last two decades, there has been a trend towards the development of smaller and more autonomous electronic devices, yet the question of how to power these microdevices with correspondingly small power sources remains. To address this problem, we employ a laser forward-transfer process in combination with ultraviolet laser micromachining, to fabricate mesoscale electrochemical power sources, such as microbatteries and micro-ultracapacitors. This direct-write laser-engineering approach enables the deposition of battery materials (hydrous ruthenium oxide, manganese oxide, lithium cobalt oxide, etc.) under ambient temperature and atmospheric conditions, resulting in films with the desired morphological and electrochemical properties. Planar and stacked cell configurations are produced and tested for their energy storage and power delivery capabilities and exhibit favorable performance in comparison to current battery technology.
INTRODUCTION Current trends for developing advanced electronic systems place emphasis in achieving sizes and weights generally associated with integrated circuits. This requires further miniaturization, while enhancing the functionality and reliability of existing components. It also requires new strategies to eliminate the long lead times required for the fabrication of prototypes and evaluation of new materials and designs. In particular, for micro-power sources development, the trend is toward the fabrication of submillimeter-scale devices which can be incorporated into any type of platform [1,2]. The small size of these power sources introduces new challenges, in particular for the fabrication and packaging of these devices. Traditional approaches for the manufacturing of power sources, such as rolling or pressing powders into metal cans, are not practical when applied to mesoscale systems. Thus, new fabrication techniques are required to develop small power sources that can be integrated with other microelectronic devices. This paper describes the use of a laser-based direct-write approach, developed at the Naval Research Laboratory, to rapidly deposit and/or process various types of micropower sources and their associated components. The laser direct-write process has been used successfully for the fabrication of mesocale energy storage systems, such as microultracapacitors, and microbatteries [3,4]. The first type of micro-power source described in this paper is the hydrous ruthenium oxide micro-ultracapacitor system. This system has a very high specific
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capacitance (capacitance per unit mass) and is therefore ideal for small system sizes [5]. These rechargeable devices can be discharged quickly at high power and are thus suitable for circuits with pulsed power requirements, such as for data transmission. The second system compr
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