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Photochemical deposition and characterization of A12O3 and TiO2 M. D. Hudson, C. Trundle, and C. J. Brierley Plessey Research CaswellLimited, Caswell, Towcester, Northamptonshire NN12 8EQ England (Received 3 June 1988; accepted 9 August 1988) Thin films of aluminum oxide and titanium dioxide have been deposited onto gallium arsenide at low temperatures (

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