Semiempirical method for calculation of secondary electron emission coefficients of insulating materials using their spe
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Sung Hwan Moon School of Materials Science and Engineering, Seoul National University, Seoul 151-744, Korea; and Samsung SDI Corporate R&D Center, Gongse-dong, Kiheung-gu, Youngin-City, Gyenggi Province 446-577, Korea
Sun Young Park School of Materials Science and Engineering, Seoul National University, Seoul 151-744, Korea
Jae Hyuk Kim School of Materials Science and Engineering, Seoul National University, Seoul 151-744, Korea; and Samsung SDI Corporate R&D Center, Gongse-dong, Kiheung-gu, Youngin-City, Gyenggi Province 446-577, Korea
Hyeong Joon Kima) School of Materials Science and Engineering, Seoul National University, Seoul 151-744, Korea; and Inter-University Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea (Received 26 March 2007; accepted 26 July 2007)
The importance of the secondary electron emission of the protective layer in the alternating current plasma display panels is widely known. However, the difficulty in measuring the secondary electron emission coefficients (␥) of insulating materials has hampered efforts to obtain accurate estimates of their values. To overcome the difficulty of direct measurement, we devised a calculating ␥ using the spectra of x-ray photoelectron spectroscopy (XPS) and a well-defined theory. The XPS spectra of the valence and core bands of MgO, Al2O3, and Y2O3 films, which were deposited by e-beam evaporation, were measured. Calculations of the ␥ values were conducted for the case when gas ions such as He, Ne, Ar, and Xe slowly approach the solid surface. I. INTRODUCTION
The secondary electron emission of the protective layer plays an important role in the discharge mechanism of the alternating current plasma display panels (acPDPs). The fact that a higher secondary electron emission coefficient (␥) leads to a lower-discharge voltage can explain the importance of the ␥ value in the reduction of power consumption. Moreover, technological needs related to the reduction of the power consumption for full high definition (full-HD) performance and single scanning of address driving circuits underscore the importance of obtaining a high ␥ value.1 To study the topics relevant to the improvement of the secondary electron emission of the protective layers, the most important and primary work is the exact measurement of the ␥ value of materials that are candidates for protective layers. Although many experiments have
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Address all correspondence to this author. e-mail: [email protected] DOI: 10.1557/JMR.2007.0390 3178
J. Mater. Res., Vol. 22, No. 11, Nov 2007
given measurement results of ␥, they have not been exact values. Since the most of the candidate materials for the protective layer are insulators, the charging effect has made it impossible to obtain exact measurements. Even if ␥ were measured exactly, the layers used for the measurement were generally much thinner (about 10 nm) than those normally used (about 500 nm).2,3 In this work, we attempted to calculate the value of ␥ semiempirically; the spectra of x-ray photoelectron spectros
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