Thermal Transport for Applications in Micro/Nanomachining
With the recent advances in nanosciences, micro/nanoscale engineering applications are bound to be more common, complex and challenging. Further understanding of thermal transport down to nanometer scales will be crucial for the design and operation of ne
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microtechnology and mems Series Editor: H. Fujita D. Liepmann The series Microtechnology and MEMS comprises text books, monographs, and state-of-the-art reports in the very active field of microsystems and microtechnology. Written by leading physicists and engineers, the books describe the basic science, device design, and applications. They will appeal to researchers, engineers, and advanced students. Mechanical Microsensors By M. Elwenspoek and R. Wiegerink
Micromechanical Photonics By H. Ukita
CMOS Cantilever Sensor Systems Atomic Force Microscopy and Gas Sensing Applications By D. Lange, O. Brand, and H. Baltes
Fast Simulation of Electro-Thermal MEMS Efficient Dynamic Compact Models By T. Bechtold, E.B. Rudnyi, and J.G. Korvink
Modelling of Microfabrication Systems By R. Nassar and W. Dai Micromachines as Tools for Nanotechnology Editor: H. Fujita Laser Diode Microsystems By H. Zappe Silicon Microchannel Heat Sinks Theories and Phenomena By L. Zhang, K.E. Goodson, and T.W. Kenny Shape Memory Microactuators By M. Kohl Force Sensors for Microelectronic Packaging Applications By J. Schwizer, M. Mayer and O. Brand Integrated Chemical Microsensor Systems in CMOS Technology By A. Hierlemann CCD Image Sensors in Deep-Ultraviolet Degradation Behavior and Damage Mechanisms By F.M. Li and A. Nathan
Piezoelectric Multilayer Beam-Bending Actuators Static and Dynamic Behavior and Aspects of Sensor Integration By R. Ballas CMOS Hotplate Chemical Microsensors By M. Graf, D. Barrettino, A. Hierlemann, and H.P. Baltes Capillary Forces in Microassembly Modeling, Simulation, Experiments, and Case Study By P. Lambert Microfluidics By J.J. Ducr´ee and R. Zengerle Thermal Transport for Applications in Micro / Nanomachining ¨¸ By B.T. Wong and M.P. Menguc
B.T. Wong ¨¸ M.P. Menguc
Thermal Transport for Applications in Micro/Nanomachining With 69 Figures
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Dr. Basil T. Wong
¨¸ Professor Dr. M. Pinar Menguc
University of Kentucky College of Engineering Department of Mechanical Engineering 318 RGAN Building Lexington, KY 40511, USA E-mail: [email protected]
University of Kentucky College of Engineering Department of Mechanical Engineering 269 RGAN Building Lexington, KY 40506-0503, USA E-mail: [email protected]
Co-Authors of Chapters 8 and 9: Ravi Kumar
Illay “Victor” Kunadian
Co-Author, Chapter 8 University of Kentucky
Co-Author, Chapter 8 University of Kentucky
Jaime A. S´anchez Co-Author, Chapter 9 University of Kentucky
Series Editors: Professor Dr. Hiroyuki Fujita University of Tokyo, Institute of Industrial Science 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan
Professor Dr. Dorian Liepmann University of California, Department of Bioengineering 6117 Echteverry Hall, Berkeley, CA 94720-1740, USA
ISSN 1439-6599 ISBN 978-3-540-73605-9 Springer Berlin Heidelberg New York Library of Congress Control Number: 2008921485 This work is subject to copyright. All rights are reserved, whether the whole or part of the material is concerned, specif ically the rights of translation, reprinting, reuse of illustrations, recit
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