Realization of Precise Tuning the Superconducting Properties of Mn-Doped Al Films for Transition Edge Sensors

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Realization of Precise Tuning the Superconducting Properties of Mn‑Doped Al Films for Transition Edge Sensors Yue Lv1,2,4 · Hao Huang1,2,4,5 · Tiangui You1,4 · Feng Ren3 · Xin Ou1,4 · Bo Gao1,2,4   · Zhen Wang1,2,4 Received: 25 March 2020 / Accepted: 14 September 2020 © Springer Science+Business Media, LLC, part of Springer Nature 2020

Abstract Magnetic impurities in metallic superconductors are important for both fundamental and applied sciences. In this study, we focused on dilute Mn-doped aluminum (AlMn) films, which are common superconducting materials used to make transition edge sensors and other superconducting devices. We developed a multi-energy ionimplantation technique to make AlMn films. Compared with frequently used sputtering techniques, ion-implantation provides more precise control of the Mn doping concentration in the AlMn films. It enables us to fabricate reliably AlMn films with a different superconducting transition temperature (Tc) that can match a variety of application needs. We also found that the superconducting transition temperature drops with increasing film thickness for samples with the same nominal concentration of Mn dopants. The dependence of Tc on the film thickness is attributed to the increasing implantation energy. By quantitatively analyzing the curves of Tc versus the Mn doping concentration, we propose that Mn dopants act as magnetic impurities and suppression of superconductivity is counteracted by the antiferromagnetic Ruderman–Kittel–Kasuya–Yosida interaction among Mn dopants, which is influenced by the defects induced in the ion-implantation process. Keywords  Transition edge sensor · Ion-implantation · AlMn · Thin film · Dilute magnetically doped superconductor · Exchange interaction

Yue Lv and Hao Huang are contributed equally to this work. Electronic supplementary material  The online version of this article (https​://doi.org/10.1007/s1090​ 9-020-02534​-y) contains supplementary material, which is available to authorized users. * Xin Ou [email protected] * Bo Gao [email protected] Extended author information available on the last page of the article

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Journal of Low Temperature Physics

1 Introduction The problem of magnetic impurities in metallic superconductor hosts has been of great interest for a long time [1–5]. Understanding interactions among magnetic impurities in such hosts poses important questions at the interface of fundamental and applied sciences [6–20]. Magnetic impurities generally suppress superconductivity. For many applications that require superconductors with transition temperature in millekelvin range, magnetically doped superconducting films are common candidates. In this letter, we focus on dilute Mn-doped aluminum (AlMn) films. We are particularly interested in AlMn because it is a representative material of magnetically doped superconductors that are used to make several important superconducting devices, including transition edge sensors (TESs) [10, 21–27], lumped element kinetic inductance detector (LEKID)