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Magnetron Sputtering Sources: AJA International's A300 Series features a fourinch target sputtering source in addition to two- and three-inch versions. All units are UHV-compatible and include modular magnet arrays. In order to eliminate magnet deterioration and corrosion and allow multiple magnetic field configurations, the magnet arrays are not immersed in cooling water. Possible source options include insitu tilt capability, integral gas ring, integral shielding chimney with disposable inserts, manual and automatic shutters, and rf and dc power supplies. Circle No. 65 on Reader Service Card. Multichamber Sputtering System: The MC-2550 from Nordiko offers dual process chambers for isolation of materials without cross contamination. The unit combines sputtering systems with a central load-locked robotic wafer handling module for substrate distribution to either of two process chambers. Each chamber accommodates up to four 8-in. sputtering electrodes for sequential or co-deposition processing in rf or dc modes. Sputter-up, sputter-down, or side-sputter geometries are available, as well as substrate heating, cooling, bias, or etch. The MC-2550 is automated with data storage and retrieval facilities and remote modem interfaces. Circle No. 71 on Reader Service Card. Protein Separation System: EM Separations' integrated system for protein separations features interchangeable cartridges prepacked with Tentacle Ion Exchange media and Superformance® glass columns. Tentacle Ion Exchangers provide large capacity with recovery, high resolution, and scale-up reproducibility. The media permit the dimethylaminoetly groups to be attached in such a manner that shortens the diffusion path, resulting in greater selectivity. The Superformance® glass columns provide zero dead volume which results in
Microscope Autofocus System: The LaserTrac from Teletrac reduces microscope focusing time by continuously tracking best focus. Unlike conventional autofocus systems, LaserTrac's laser system eliminates the stop/search phase so that objects are already in focus when the microscope stage stops moving. LaserTrac can focus on zero-contrast, low-reflectivity surfaces such as glass and fits most modular microscopes. The system may be installed in the field in less than one hour. Circle No. 69 on Reader Service Card. Silicon MBE System: Superior Vacuum Technology's Model 446 system provides silicon and silicon-compound epitaxial film growth in a "cluster tool" design. The system consists of three self-contained UHV chamber modules. The multisample introduction/load-lock module with two transfer rods accommodates up to 6-in. wafers, and the preparation chamber provides UHV storage for eight wafers in a high-temperature outgas chamber. The growth chamber includes shuttered viewports, thickness monitors, multipocket and dual e-beam evaporators, and six effusion cell ports. Additional ports are provided for analytical or processing equipment. Circle No. 72 on Reader Service Card. Thin Film Monitor: The XTM/2 thin film monitor from Leybold Inficon p
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