Semiconductor Physical Electronics
The purpose of this book is to provide the reader with a self-contained treatment of fundamen tal solid state and semiconductor device physics. The material presented in the text is based upon the lecture notes of a one-year graduate course sequence taug
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MICRODEVICES Physics and Fabrication Technologies Series Editors: Ivor Brodie and Julius J. Murayt SRI International Menlo Park, California
ELECTRON AND ION OPTICS Miklos Szilagyi GaAs DEVICES AND CIRCUITS Michael Shur ORIENTED CRYSTALLIZATION ON AMORPHOUS SUBSTRATES E. I. Givargizov THE PHYSICS OF MICROjNANO-FABRICATION Ivor Brodie and Julius J. Muray PHYSICS OF SUBMICRON DEVICES David K. Ferry and Robert O. Grondin THE PHYSICS OF SUBMICRON LITHOGRAPHY Kamil A. Valiev SEMICONDUCTOR LITHOGRAPHY Principles, Practices, and Materials Wayne M. Moreau SEMICONDUCTOR PHYSICAL ELECTRONICS Sheng S. Li
t Deceased. A Continuation Order Plan is available for this series. A continuation order will bring delivery of each new volume immediately upon publication. Volumes are billed only upon actual shipment. For further information please contact the publisher.
Semiconductor Physical Electronics Sheng S. Li Department of Electrical Engineering University of Florida Gainesville, Florida
Plenum Press • New York and London
Ll, Shang S .. 1938S.. lconductor physlc.' electronic. I Shlng S. L1. p. c •• -- (Mlcrod,vlclS 1 Includ .. bl~llographlcal reflrenc .. and Indl ••
1. S,.lconductors. II. Serl ••• TK7871.85.L495 1993 621.3815·2--dc20
2. Solid Uatl physics.
1. Tltll. 92-28807 CIP
1098765432 ISBN-13: 978-1-4612-7635-7 DOl: 10.1007/978-1-4613-0489-0
e-ISBN-13: 978-1-4613-0489-0
© 1993 Plenum Press, New York Softcover reprint of the hardcover 1st edition 1993 A Division of Plenum Publishing Corporation 233 Spring Street, New York, N.Y. loon All rights reserved No part of this book may be reproduced, stored in a retrieval system, or transmitted in any form or by any means, e1ectronic, mechanical. photocopying. microfilming, recording. or otherwise, without written permission from the Publisher
Preface The purpose of this book is to provide the reader with a self-contained treatment of fundamental solid state and semiconductor device physics. The material presented in the text is based upon the lecture notes of a one-year graduate course sequence taught by this author for many years in the ·Department of Electrical Engineering of the University of Florida. It is intended as an introductory textbook for graduate students in electrical engineering. However, many students from other disciplines and backgrounds such as chemical engineering, materials science, and physics have also taken this course sequence, and will be interested in the material presented herein. This book may also serve as a general reference for device engineers in the semiconductor industry. The present volume covers a wide variety of topics on basic solid state physics and physical principles of various semiconductor devices. The main subjects covered include crystal structures, lattice dynamics, semiconductor statistics, energy band theory, excess carrier phenomena and recombination mechanisms, carrier transport and scattering mechanisms, optical properties, photoelectric effects, metal-semiconductor devices, the p--n junction diode, bipolar junction tra
