Sputtering by Particle Bombardment Experiments and Computer Calculat
This volume gives a comprehensive overview about the physical processes causing sputtering of solids at bombardment with energetic ions. The most important quantities are the sputtering yields, i.e. the average number of atoms eroded per incident ion. The
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Topics in Applied Physics Topics in Applied Physics is a well-established series of review books, each of which presents a comprehensive survey of a selected topic within the broad area of applied physics. Edited and written by leading research scientists in the field concerned, each volume contains review contributions covering the various aspects of the topic. Together these provide an overview of the state of the art in the respective field, extending from an introduction to the subject right up to the frontiers of contemporary research. Topics in Applied Physics is addressed to all scientists at universities and in industry who wish to obtain an overview and to keep abreast of advances in applied physics. The series also provides easy but comprehensive access to the fields for newcomers starting research. Contributions are specially commissioned. The Managing Editors are open to any suggestions for topics coming from the community of applied physicists no matter what the field and encourage prospective editors to approach them with ideas.
Managing Editor Dr. Claus E. Ascheron Springer-Verlag GmbH Tiergartenstr. 17 69121 Heidelberg Germany Email: [email protected]
Assistant Editor Dr. Werner Skolaut Springer-Verlag GmbH Tiergartenstr. 17 69121 Heidelberg Germany Email: [email protected]
Rainer Behrisch, Wolfgang Eckstein (Eds.)
Sputtering by Particle Bombardment Experiments and Computer Calculations from Threshold to MeV Energies
With 201 Figures
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Rainer Behrisch Max-Planck-Institut für Plasmaphysik, Boltzmannstr. 2, 85748 Garching, Germany [email protected]
Wolfgang Eckstein Max-Planck-Institut für Plasmaphysik, Boltzmannstr. 2, 85748 Garching, Germany [email protected]
Library of Congress Control Number: 2007920813
Physics and Astronomy Classification Scheme (PACS): 02.70.-e,34.50.Bw,68.49.Sf,71.15.Pd,79.20.Rf
ISSN print edition: 0303-4216 ISSN electronic edition: 1437-0859 ISBN 987-3-540-44500-5 Springer Berlin Heidelberg New York This work is subject to copyright. All rights are reserved, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilm or in any other way, and storage in data banks. Duplication of this publication or parts thereof is permitted only under the provisions of the German Copyright Law of September 9, 1965, in its current version, and permission for use must always be obtained from Springer. Violations are liable for prosecution under the German Copyright Law. Springer is a part of Springer Science+Business Media springer.com © Springer-Verlag Berlin Heidelberg 2007 The use of general descriptive names, registered names, trademarks, etc. in this publication does not imply, even in the absence of a s
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