Structural-Chemical Properties of InP Own Oxides
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ABSTRACT In this article the analysis of IR reflection-absorption spectra of InP own oxides, formed by anodic, thermal and chemical oxidation was made. The influence of oxidation methods, heat treatment and presence of metal covering at the outside surface of own oxides on their structuralchemical properties were determined. On the basis of received results, the explanations of the causes of the change in electrophysical properties of InP own oxides were obtained. INTRODUCTION At present it is determined that InP own oxides are not mono-phase materials and that their chemical composition can depend on both forming conditions and modes of following heat treatment [1-4]. However we don't have enough information for comparable analysis of characteristics of own oxides formed by different methods and for understanding the nature of effects responsible for low thermal stability of InP own oxides parameters. In this report we made an attempt to carry out an analysis of structural properties of InP own oxides formed in different conditions using identical circumstances, and to obtain information about the influence of oxidation methods, heat treatment modes, and the presence of metal covering at the outside surface of own oxides on their structural chemical properties. METHODOLOGY OF EXPERIMENT In carrying out our research we used InP own oxides formed by anodic, chemical, and thermal oxidation. Anodic oxidation was made in aquatic solution of citrate ammonium in potential-state regime(U = 100 V, pH = 5-6). For chemical oxidation of InP we used concentrated nitric acid (To,=801C, t.,,= 15 min). Thermal oxidation was made in a flow of damp oxygen (Tox-=450°C, T(H20)=95°C,t 0o=60 min). For determination of structural-chemical properties of InP own oxides we have used the method of IR-spectroscopy, which was described in [5].Spectra of IR reflection-absorption wrote down at two-beam IR-spectroscope in conditions of repeated going p-polarized radiation through research structures. Influence of heat treatment on the structural-chemical properties of InP own oxides was estimated on change of their spectra of IR reflection-absorption after treatment at temperatures 300 0C and 530°C in atmosphere of N2 +02. Time of heat treatments was equal to 60 min. According to [61 these temperatures correspond to condition of improvement (3001C) and degradation (530'C) of electro-physical properties of InP own oxides . Influence of metal covering on the structural-chemical properties of InP own oxides was investigated on the base of analysis of IR spectra of Au- and Al-own oxide-InP structures. 497 Mat. Res. Soc. Symp. Proc. Vol. 355 01995 Materials Research Society
SPECTRA OF IR REFLECTION-ABSORPTION OF InP OWN OXIDES Fig. 1 shows IR spectra of reflection-absorption of InP own oxides, formed by different methods. It is seen, that in spectral diapason of 1400-800 sm' these spectra are wide strip on which one can separate characteristic strips of absorption at 940, 1010, 1090, 1150 and 1220 sm-1.
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