Study on C60 doped PMMA for organic memory devices
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Study on C60 doped PMMA for organic memory devices Micaël Charbonneau1, Raluca Tiron1, Julien Buckley1, Mathieu Py1, Jean Paul Barnes1, Samir Derrough1, Christophe Constancias1, Christophe Licitra1, Claire Sourd1, Gérard Ghibaudo2, Barbara De Salvo1 1 CEA, LETI, MINATEC, 17 rue des Martyrs, 38054 Grenoble cedex 9, France 2 IMEP-LAHC, CNRS, MINATEC, 38016 Grenoble France ABSTRACT In this paper, fabrication of nanocomposite thin films with introduction of fullerene (C60) molecules in PolyMethyl MethAcrylate resist (PMMA) was investigated from a material and electrical point of view. The effective inclusion of C60 molecules in the samples was characterized by using UV-vis and Tof-SIMS instruments. The modified resist PMMA:C60 was also studied with Thermal analysis (TGA, DSC) where modification of physical properties is reported. Films were included in MIS and MIM devices and results on non volatile trapping of C60 doped PMMA are presented. Moreover, e-beam exposure tests showed that PMMA:C60 active layers for memory devices, were scalable in size. INTRODUCTION The recent growth of interest in so called “organic electronics” opens new opportunities to investigate blends of well-known materials. In this context organic polymers and nanocomposites are very promising. Indeed research has already successfully demonstrated the use of organic bulk materials for the fabrication of electronic and optoelectronic devices [1,2]. Recently, several groups have also investigated polymeric materials for memory applications [34]. These materials offer important advantages in terms of fabrication methodology and properties tunability: wide versatility in chemical composition allowing large tailoring of electrical behavior, simple processable deposition methods, high flexibility and low cost. These materials could be included in different devices such as capacitors, transistors or resistors, suitable for different memory architectures [5]. In particular, MIS (Metal Insulator Semiconductor) [6] and MIM (Metal Insulator Metal) [7] structures have been largely studied in the literature, the insulator being implemented with macro-polymers, copolymers or nanocomposites with metallic nano-particles or small organic molecule inclusions [5]. High attention has been given in the literature to compositions including C60 fullerenes in polymer thin films such as: PVK (poly(Nvinylcarbazole)), PVP (Poly-4-vinylphenol), PS (Polystyrene) and PMMA [5,6,7,8,9]. We propose in this work an extensive and novel study of PMMA-based nanocomposites with C60 inclusions (Figure 1-a). EXPERIMENTS Poly-Methyl-MethAcrylate polymer (PMMA) previously dissolved in Anisole (2 mg/mL; Mw = 950K) was purchased from MicroChem. The fullerene solution was obtained by dissolving C60 powder from Sigma Aldrich in Toluene (2.6 mg/mL). Then PMMA:C60 solutions were mixed from PMMA:Anisole, C60:Toluene and completed with pure Toluene to obtain the targeted amount of C60 and keep a constant Solvent\Materials ratio for the different
compositions. After sonication the res
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