Synthesis of silicon-based polymerized films by excimer laser ablation deposition of hexaphenyldisilane
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Synthesis of silicon-based polymerized films by excimer laser ablation deposition of hexaphenyldisilane Xiaoyan Zeng,a) Fabrice Rossignol, Shigeru Konno, Hideaki Nagai, Yoshinori Nakata, Takeshi Okutani, and Masaaki Suzuki Hokkaido National Industrial Research Institute, 2-17-2-1, Tsukisamu-Higashi, Toyohira-ku, Sapporo 062-8517, Japan (Received 2 March 1998; accepted 13 April 1998)
A new method of synthesizing silicon-based polymer films by excimer laser ablation of hexaphenyldisilane (HPDS) has been studied. The polymerized films were formed on a substrate by laser ablation deposition of HPDS at 248 nm. The structure of the polymerized films depended strongly on the laser fluence and repetition rates. The thermal stability and hardness of the deposited films were estimated by thermogravimetry and a Vickers microhardness meter. The films showed good thermal stability, depending on the laser processing parameters.
I. INTRODUCTION
Laser ablation phenomena of various materials have been extensively investigated from both practical and fundamental aspects, since laser ablation has many characteristic advantages for material syntheses, such as stoichiometric transfer of material and capability for reactive deposition in ambient gases.1 Since the first report on polymer film deposition by UV laser ablation appeared in 1988,2 laser ablation deposition of polymer films has attracted considerable attention as a solvent-free film deposition technique. Various polymer films such as poly-tetrafluoroethylene (PTFE), poly-methylmethacrylate (PMMA), polyethyleneterephthalate (PET), 6,6-Nylon, polyimide (PI)2–15 have been produced by laser ablation deposition to investigate the potential application in microelectronics and optics. Most researchers have focused their attention on PTFE2–8 and its composites,9,10 since PTFE has excellent properties such as a low dielectric constant and high mechanical strength. However, PTFE films are difficult to produce by conventional methods due to their insolubility in the organic solvents. It was reported that uniform and dense PTFE films with basically the same composition as the PTFE targets could be obtained by laser ablation deposition. However, there are few papers dealing with the laser ablation deposition of silicon-based polymers, although the ablation behavior and the ablated fragments were analyzed with several kinds of polysilane.16–18 Siliconbased polymers are expected to be new functional materials.19,20 Polysiloxanes are already produced on a)
Present address: Materials Science and Engineering Department, Huazhong University of Science and Technology, Wuhan – 430074, People’s Republic of China.
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http://journals.cambridge.org
J. Mater. Res., Vol. 14, No. 1, Jan 1999
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an industrial scale and are used in various fields due to their excellent heat resistivity and chemical stability.21 Many other silicon-based polymers, besides polysiloxanes, have still been studied to determine their synthesis methods and
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