The Helium Ion Microscope

The key technologies that comprise the helium ion microscope are described in detail. Specific attention is given the cryogenic cooling system, the vacuum system, the gas delivery system, the ion-optical column, the detector and imaging system, and vibrat

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Gregor Hlawacek Armin Gölzhäuser Editors

Helium Ion Microscopy

NanoScience and Technology Series editors Phaedon Avouris, Yorktown Heights, USA Bharat Bhushan, Columbus, USA Dieter Bimberg, Berlin, Germany Cun-Zheng Ning, Tempe, USA Klaus von Klitzing, Stuttgart, Germany Roland Wiesendanger, Hamburg, Germany

The series NanoScience and Technology is focused on the fascinating nano-world, mesoscopic physics, analysis with atomic resolution, nano and quantum-effect devices, nanomechanics and atomic-scale processes. All the basic aspects and technology-oriented developments in this emerging discipline are covered by comprehensive and timely books. The series constitutes a survey of the relevant special topics, which are presented by leading experts in the field. These books will appeal to researchers, engineers, and advanced students.

More information about this series at http://www.springer.com/series/3705

Gregor Hlawacek ⋅ Armin Gölzhäuser Editors

Helium Ion Microscopy

123

Editors Gregor Hlawacek Institute of Ion Beam Physics and Materials Research Helmholtz-Zentrum Dresden-Rossendorf Dresden Germany

ISSN 1434-4904 NanoScience and Technology ISBN 978-3-319-41988-6 DOI 10.1007/978-3-319-41990-9

Armin Gölzhäuser Physics of Supramolecular Systems and Surfaces Bielefeld University Bielefeld Germany

ISSN 2197-7127

(electronic)

ISBN 978-3-319-41990-9

(eBook)

Library of Congress Control Number: 2016946009 © Springer International Publishing Switzerland 2016 This work is subject to copyright. All rights are reserved by the Publisher, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilms or in any other physical way, and transmission or information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now known or hereafter developed. The use of general descriptive names, registered names, trademarks, service marks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. The publisher, the authors and the editors are safe to assume that the advice and information in this book are believed to be true and accurate at the date of publication. Neither the publisher nor the authors or the editors give a warranty, express or implied, with respect to the material contained herein or for any errors or omissions that may have been made. Printed on acid-free paper This Springer imprint is published by Springer Nature The registered company is Springer International Publishing AG Switzerland

Preface

Scientific research is often characterized by a combination of open questions and specific research tools that are designed to solve them. This interplay happens in both directions, and new scientific instruments can also bring attention to novel scientific questions, or can even define entire scientific period