The Helium Ion Microscope

The key technologies that comprise the helium ion microscope are described in detail. Specific attention is given the cryogenic cooling system, the vacuum system, the gas delivery system, the ion-optical column, the detector and imaging system, and vibrat

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Gregor Hlawacek Armin Gölzhäuser Editors

Helium Ion Microscopy

NanoScience and Technology Series editors Phaedon Avouris, Yorktown Heights, USA Bharat Bhushan, Columbus, USA Dieter Bimberg, Berlin, Germany Cun-Zheng Ning, Tempe, USA Klaus von Klitzing, Stuttgart, Germany Roland Wiesendanger, Hamburg, Germany

The series NanoScience and Technology is focused on the fascinating nano-world, mesoscopic physics, analysis with atomic resolution, nano and quantum-effect devices, nanomechanics and atomic-scale processes. All the basic aspects and technology-oriented developments in this emerging discipline are covered by comprehensive and timely books. The series constitutes a survey of the relevant special topics, which are presented by leading experts in the field. These books will appeal to researchers, engineers, and advanced students.

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Gregor Hlawacek ⋅ Armin Gölzhäuser Editors

Helium Ion Microscopy


Editors Gregor Hlawacek Institute of Ion Beam Physics and Materials Research Helmholtz-Zentrum Dresden-Rossendorf Dresden Germany

ISSN 1434-4904 NanoScience and Technology ISBN 978-3-319-41988-6 DOI 10.1007/978-3-319-41990-9

Armin Gölzhäuser Physics of Supramolecular Systems and Surfaces Bielefeld University Bielefeld Germany

ISSN 2197-7127


ISBN 978-3-319-41990-9


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Scientific research is often characterized by a combination of open questions and specific research tools that are designed to solve them. This interplay happens in both directions, and new scientific instruments can also bring attention to novel scientific questions, or can even define entire scientific period