Helium Ion Microscopy Principles and Applications
Helium Ion Microscopy: Principles and Applications describes the theory and discusses the practical details of why scanning microscopes using beams of light ions – such as the Helium Ion Microscope (HIM) – are destined to become the imaging tools of choic
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David C. Joy
Helium Ion Microscopy Principles and Applications
SpringerBriefs in Materials
For further volumes: http://www.springer.com/series/10111
David C. Joy
Helium Ion Microscopy Principles and Applications
123
David C. Joy University of Tennessee Knoxville, TN USA
ISSN 2192-1091 ISBN 978-1-4614-8659-6 DOI 10.1007/978-1-4614-8660-2
ISSN 2192-1105 (electronic) ISBN 978-1-4614-8660-2 (eBook)
Springer New York Heidelberg Dordrecht London Library of Congress Control Number: 2013946312 Ó David C. Joy 2013 This work is subject to copyright. All rights are reserved by the Publisher, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilms or in any other physical way, and transmission or information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now known or hereafter developed. Exempted from this legal reservation are brief excerpts in connection with reviews or scholarly analysis or material supplied specifically for the purpose of being entered and executed on a computer system, for exclusive use by the purchaser of the work. Duplication of this publication or parts thereof is permitted only under the provisions of the Copyright Law of the Publisher’s location, in its current version, and permission for use must always be obtained from Springer. Permissions for use may be obtained through RightsLink at the Copyright Clearance Center. Violations are liable to prosecution under the respective Copyright Law. The use of general descriptive names, registered names, trademarks, service marks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. While the advice and information in this book are believed to be true and accurate at the date of publication, neither the authors nor the editors nor the publisher can accept any legal responsibility for any errors or omissions that may be made. The publisher makes no warranty, express or implied, with respect to the material contained herein. Printed on acid-free paper Springer is part of Springer Science+Business Media (www.springer.com)
Acknowledgments
Thanks to Dr. John Notte (Zeiss) for critically reading this manuscript and for sharing his unique expertise in this field; Dr. Brendan Griffin (University of Western Australia); Dr. Lucille Giannuzzi (L. A. Giannuzzi & Associates LLC); Dr. Joe Michael (Sandia National Laboratory); and Dr. Dale Newbury (NIST) for their specialist insights and generous help.
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Contents
1
Introduction to Helium Ion Microscopy . . . . . . . . . . . . . . . . . . . .
1
2
Microscopy with Ions: A Brief History . . . . . . . . . . . . . . . . . . . . .
5
3
Operating the Helium Ion Microscope . . . . . . . . . . . . . . . . . . . . . 3.1 The Ion Source . . . . . . . . . . . . . . . . . . . . . . . .
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