The Improvement of Mechanical Properties of Aluminum Nitride and Alumina by 1 Kev Ar + Ion Irradiation in Reactive Gas E
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ABSTRACT Ar ions with 1 keV energy was irradiated on aluminum nitride in an 02 environment to increase the bonding strength with Cu and also on alumina in an N2 environment to increase the bending strength. Cu(1000 A) films were deposited by ion-beam sputter on Ar' irradiated/unirradiated AIN surfaces and the change of the bond strength was investigated by a scratch test. For the study of chemical structural change on the Ar+ irradiated AIN surface, Cu(50A) were deposited on an AIN substrate and XPS depth profile analysis was performed. Cu films deposited on Art irradiated AIN under an 02 environment showed the bond strength of 30 Newton by a scratch test. On the basis of Cu3p, Al2p near core levels and 01 s, N ls core level spectra, it was found that the improvement of bond strength of Cu films on the AIN surface resulted from the formation of intermediate layers such as copper oxide and aluminum oxynitride. The bending strength of polycrystalline alumina irradiated by Ar ions in an N2 environment was also increased.
INTRODUCTION Aluminum nitride(A1N) ceramic is a good candidate material to be used in integrated packages due to its high thermal conductivity and electrical resistivity. [1] Interfacial oxide layers are known to be necessary in the manufacture of electronic circuits on AIN substrates to improve the bond strength between the metal layer and the AIN. Alumina(A120 3) has been widely applied for semiconductor memory devices and insulating materials in fusion reactor, etc.[2] In these applications, A120 3 is very sensitive to the condition of the surface. Tensile surface stress can give rise to crack propagation and low fracture toughness. Surface hardness will affect the wear properties of ceramics or ceramic coated tools. The bending, bond strength, and Weibull modulus of ceramics are important in structural applications such as cutting tools, artificial bone and joints, and IC substrates. Ion implantation and ion beams mixing techniques using high energy ion beams with a few hundred keV or MeV have been widely used to improve the mechanical properties of ceramic materials, such as wear resistance, erosion, and adhesion, etc.[3-4] Bending strength improvement by large size ion implantation, such as, Zr+, Ti+, W+ on ceramics has been investigated by many researchers. [5-6] These studies revealed that bending strength was enhanced by induced compressive surface residual stress from the volume expansion due to condensed defect formation in the implanted region. Moreover, ion implantations with 'H,12 C,14N, and 40Ar were carried out at ion energies of 100 to 500 keV and volume expansion in the implanted layer was observed for all ions.[7] Recently, we reported that Ar ion irradiation with I keV energy under a reactive gas environment improved significantly the wettability of PMMA and PC to water and adhesion of the polymers to Al and Cu films. [8] In this paper, we present the results of a study of Ar irradiation 261 Mat. Res. Soc. Symp. Proc. Vol. 396 ©1996 Materials Research Society
on AIN and A12 0 3
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