The positive roles of metallic droplets in deposition of alloy films by cathodic arc plasma deposition
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The positive roles of metallic droplets in deposition of alloy films by cathodic arc plasma deposition She-Guan Wang and Xin-De Bai Department of Materials Science and Engineering, Tsinghua University, Beijing, 100084, People’s Republic of China
Bao-Chu Wang Department 7, Central Iron and Steel Research Institute, Beijing, 100081, People’s Republic of China
Yu-Dian Fan Department of Materials Science and Engineering, Tsinghua University, Beijing, 100084, People’s Republic of China (Received 28 August 1995; accepted 15 January 1996)
The roles of metallic droplets, which generated from the cathodic arc spot holes in the technology of Cathodic Arc Plasma Deposition (CAPD), are investigated by SEM, TEM, image analysis apparatus, and electronic probe energy spectrum analysis. The results show that though many papers in recent years are devoted to eliminate them, the metallic droplets, including the macrodroplets, have many important positive roles in the preparation of alloy films: they are the main factor to transfer the original composition of alloy cathodic target to the alloy thick films; they preserve the high deposition rate of CAPD to form the basic characteristics of the microstructure and to affect the pore ratios of the films; they also preserve the high melting point elements in the alloy films, and therefore preserve the corrosion resistance of the alloy in the films. The macrodroplets can be eliminated by raising the substrate temperature properly, which is permitted in some cases, such as depositing alloy films onto middle carbon steel as an anticorrosion system, etc.
I. INTRODUCTION
The Cathodic Arc Plasma Deposition (CAPD) technology has been developing since the 1970s,1 and has made vigorous advancements in recent years because it has many unique advantages, such as very high deposition rate,2 being able to form reactive films at very low substrate temperature,3 etc. The early research work was mostly concentrated on the preparation of wear resistant films. Recently, a lot of work was reported on how to delete the macroparticles4–7 and on a new application trend of preparing alloy films using CAPD.8–10 It is believed that the macrodroplets are negative to the quality of films, such as its reducing film density, gloss, and hardness, and increasing pore ratio of films, surface roughness, and so forth. In this paper, the roles of droplets in the preparation of alloy films by CAPD are reinvestigated and reevaluated. Some positive roles of the droplets, including the macrodroplets, are found. The work in this paper begins with the investigation of the droplet roles in the preliminary deposition mechanism and in preserving the original composition of alloy target, above all, preserving the high melting point elements and transferring them to the alloy films, then continues with the droplet roles affecting the film microstructure formation including the film pore ratios, and finally concludes with how to J. Mater. Res., Vol. 11, No. 5, May 1996
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