Thin film encapsulation for the organic light-emitting diodes display via atomic layer deposition
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ATOMIC LAYER DEPOSITION FOR EMERGING THIN-FILM MATERIALS AND APPLICATIONS
Thin film encapsulation for the organic light-emitting diodes display via atomic layer deposition Yun Li1, Yingfei Xiong2, Huizhi Yang3, Kun Cao1, Rong Chen1,a) 1
State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan, Hubei 430074, People’s Republic of China; and School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan, Hubei 430074, People’s Republic of China 2 State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan, Hubei 430074, People’s Republic of China; and China-EU Institute for Clean and Renewable Energy, Huazhong University of Science and Technology, Wuhan, Hubei 430074, People’s Republic of China 3 State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan, Hubei 430074, People’s Republic of China; and School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan, Hubei 430074, People’s Republic of China a) Address all correspondence to this author. e-mail: [email protected] This paper has been selected as an Invited Feature Paper. Received: 28 August 2019; accepted: 9 October 2019
Organic light-emitting diodes (OLEDs) have aroused great attention due to the advantages of high luminescent efficiency, fast response time, wide viewing angle, and the compatibility with the flexible electronics. Nevertheless, the organic luminescent materials are vulnerable to environment moisture/oxygen. Thus, how to protect the OLEDs from the ambient moisture/oxygen erosion is of great importance to ensure the stability and reliability. Thin film encapsulation (TFE) via atomic layer deposition (ALD) has emerged as a potential method to meet the encapsulation requirements of OLEDs due to its unique assets. In this review, the challenges of TFE, including pinholes, crystallization, cracks, and overheated, are introduced first. The ALD-based monolayer, composite structures, and hybrid laminates were developed to improve the barrier property, flexibility, and thermal conductivity. Besides, the ALD reactors and processes for TFE are also reviewed. Finally, the challenges remained and future development in the stabilization of OLEDs via ALD are also discussed.
Introduction
ambient [15], leading to the degradation of the OLEDs. Glass
The development of the display industry has experienced different stages from the cathode ray tube [1], liquid crystal display [2], and plasma display panel [3] to the light-emitting diodes (LEDs) [4]. Due to the excellent properties of organic luminescent materials such as high efficiency, high contrast, fast response time, and wide viewing angle, organic LED (OLED) is becoming the dominant trend for the nextgeneration display technology [5, 6]. Light would emit from the polymer or small organic molecules (such as TPP [7], Alq3
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