Thin Film Polymer Stress Measurement Using Piezoresistive Anisotropically Etched Pressure Sensors
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is the biaxial elastic modulus of the substrate (1.805 X 1011 Pa for (100) silicon), ts is the substrate (w-v) thickness, tf is the deposited films thickness, R is the radius of curvature, and a is the calculated stress. This measurement assumes that tf
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