Widely sensitive optical humidity module by using acrylic resin and a position sensitivity detector
- PDF / 1,160,986 Bytes
- 11 Pages / 439.37 x 666.142 pts Page_size
- 35 Downloads / 141 Views
Widely sensitive optical humidity module by using acrylic resin and a position sensitivity detector Hyong Su Yu1 · Nam Chol Yu1 · Jong Ai Rim2 · Myong Jin Jo1 Received: 17 April 2020 / Accepted: 3 September 2020 © Springer Science+Business Media, LLC, part of Springer Nature 2020
Abstract Humidity sensor module fabricated using acrylic resin and PSD (position sensitivity detector). In order to directly convert to electrical signal from output signal of optical humidity sensor system consisted of a light source, a gap, and an acrylic resin film coated on PSD. For the purpose of convert to 4–20 mA signal from current change according to the relative humidity (RH) integrated amplification of output current and 4–20 mA module by a 0.8 µm analog mixed CMOS process. Using the fabricated humidity sensor and Pt-100 accomplished one-bodied temperature-humidity sensor module and tested. The experimental results show that the sensitivity and linearity of sensor get better, while the thickness of the acrylic resin film is increased. The linearity of RH-current characteristics is good in the measuring range from 10 to 90% at 15 °C. The sensitivity of this sensor is 6.52–7.34μA/% RH. Furthermore, the current at PSD is measured with the rise and drop of RH, and the four times repetition is also recorded, which all demonstrate the good stability and repeatability of our proposed structure. Keywords Optical humidity sensor · Acrylic resin · PSD · 4–20 mA module
1 Introduction The humidity is an important physical quantity. Today’s ear of environmental protection, meteorology, defense aerospace, warehousing, industrial and agricultural production sector, almost every industry relates to the detection of humidity. Studies regarding the development of sensors that responds to a large dynamic range of RH, based on measurements of electrical and optical properties, have been described, such as capacitive, resistive (Demir 2012; Nahar 2012), piezoelectric (Emmer and Pritchard 1994), chilled mirror hygrometer (Hudoklin et al. 2008), psychrometer (Kalogiros and Helmis 1993) and infrared optical absorption (Glenn et al. 2001) sensors. In recent years, fiber-optic humidity sensors have * Hyong Su Yu yhs611012@star‑co.net.kp 1
Semiconductor Institute, Kim Chaek University of Technology, 60‑Kyougu, Yonggwang Street, Pyongyang, Democratic People’s Republic of Korea
2
Chemical Faculty, Kim II Sung University, 38‑Ryomyong, Ryomyong Street, Pyongyang, Democratic People’s Republic of Korea
13
Vol.:(0123456789)
469
Page 2 of 11
H. S. Yu et al.
been studied widely due to their many advantages such as compact size, high sensitivity and good resistance to chemical corrosion and insusceptibility to electromagnetic interference. According to the sensing mechanisms and structures, fiber-optic humidity sensors can be divided as several kinds (Anuj et al. 2020; Youqing et al. 2016; Peter and Jon 2017, 2018). The optical fiber humidity sensing by using acrylic resin has been accomplished in different applications (Jing et al. 2004; Motw
Data Loading...
