3-Dimensional VLSI A 2.5-Dimensional Integration Scheme
"3-Dimensional VLSI: A 2.5-Dimensional Integration Scheme"elaborates the concept and importance of 3-Dimensional (3-D) VLSI. The authors have developed a new 3-D IC integration paradigm, so-called 2.5-D integration, to address many problems that are hard
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3-Dimensional VLSI A 2.5-Dimensional Integration Scheme
Yangdong Deng Wojciech P. Maly
3-Dimensional VLSI A 2.5-Dimensional Integration Scheme
With 63 figures
Authors Prof. Yangdong Deng
Prof. Wojciech P. Maly
Institute of Microelectronics
Electrical and Computer Engineering
Tsinghua University
Carnegie Mellon University
Beijing 100084, P. R. China
5000 Forbes Avenue, Pittsburgh, PA 15213-3891
Email: [email protected]
USA Email: [email protected]
ISBN 978-7-302-21165-5 Tsinghua University Press, Beijing ISBN 978-3-642-04156-3 e-ISBN 978-3-642-04157-0 Springer Heidelberg Dordrecht London New York Library of Congress Control Number: 2009933256 ¤ Tsinghua University Press, Beijing and Springer-Verlag Berlin Heidelberg 2010 This work is subject to copyright. All rights are reserved, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilm or in any other way, and storage in data banks. Duplication of this publication or parts thereof is permitted only under the provisions of the German Copyright Law of September 9, 1965, in its current version, and permission for use must always be obtained from Springer. Violations are liable to prosecution under the German Copyright Law. The use of general descriptive names, registered names, trademarks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. Cover design: Frido Steinen-Broo, EStudio Calamar, Spain Printed on acid-free paper Springer is part of Springer Science +Business Media (www.springer.com)
Yangdong Deng Wojciech P. Maly
፤ᡓܷഴᬶႂᡸ úú ፤ᬶழ 3-Dimensional VLSI – A 2.5-Dimensional Integration Scheme With 63 figures and 16 tables
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