3D finite element analysis of corrugated silicon carbide membrane for ultrasonic MEMS microphone applications
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TECHNICAL PAPER
3D finite element analysis of corrugated silicon carbide membrane for ultrasonic MEMS microphone applications Rahmat Zaki Auliya1 • Poh Choon Ooi1 • M. F. Mohd. Razip Wee1 • Muhammad Aniq Shazni Mohammad Haniff1 • Siti Aisyah Zawawi1 • Azrul Azlan Hamzah1 Received: 19 June 2020 / Accepted: 18 August 2020 Ó Springer-Verlag GmbH Germany, part of Springer Nature 2020
Abstract We investigated theoretically the feasibility of the SiC membrane to be applied to a MEMS capacitive microphone system in the ultrasonic frequency range. The fascinating electromechanical properties of SiC materials as membranes were examined to operate beyond 20 kHz to detect sound waves. The finite element method of real behavior microphone was conducted to analyze comprehensively the mechanical, electrical, and thermoviscous-acoustical interaction of the SiCbased microphone. A static analysis study speculated that the SiC membrane has high pull-in voltage that would overcome membrane touch backplate problems in narrow air gap dimension. A complete 3D model of the microphone with acoustic holes and backchamber was proposed in dynamic analysis to evaluate SiC membrane performance as ultrasonic sound detection. The dimension of acoustic holes was varied to optimize low air damping characteristics for the improvement of the microphone resonance frequency. The sensitivity of the proposed model was measured at - 65 dB and can be further improved by designing a corrugated membrane structure with a corrugation width of 40 lm to achieve - 60 dB. The corrugated Si membrane observed the shift in the resonance frequency to 51 kHz as compared to the plane SiC-based microphone that was located at 70 kHz.
1 Introduction The requirements for a smaller device with lower power consumption and reduced fabrication cost have led to the usage of microelectromechanical systems (MEMS) technology in various applications such as accelerometers, pressure sensors, gyroscope, and microphone. In the case of MEMS microphones, it has been implemented in a compact and handheld device in smartphones, laptops, and hearing aids as a replacement for cumbersome conventional microphones with the comparable performance (Zawawi et al. 2020; Woo et al. 2017; Latif et al. 2010). MEMS microphone could also offer a high signal-to-noise ratio, quick response, long term, and temperature stability. However, most of the fabricated MEMS microphones were designed for an audible frequency range with the upper & Poh Choon Ooi [email protected] & M. F. Mohd. Razip Wee [email protected] 1
Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, 43600 Bangi, Malaysia
limit of operating frequency at 20 kHz limited by the membrane mechanical properties. For the frequency beyond 20 kHz that is known as ultrasonic, it is very useful for animal acoustic communication, biomedical imaging, obstacle detection, and non-destructive testing. For example, a recent study demonstrated that a vocal repertoire of rats
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