A new analytical model for switching time of a perforated MEMS switch
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TECHNICAL PAPER
A new analytical model for switching time of a perforated MEMS switch K. Guha1
•
N. M. Laskar1 • H. J. Gogoi1 • K. L. Baishnab1 • K. Srinivasa Rao2
Received: 31 July 2017 / Accepted: 14 February 2018 Ó Springer-Verlag GmbH Germany, part of Springer Nature 2018
Abstract In this paper, the design of a low-k meander based MEMS shunt capacitive switch with perforated beam meander has been presented. A closed form analytical model to calculate the switching time of designed structure is proposed. The model is based on modified Mejis and Fokkema’s capacitance model and linearization of non-linear electrostatic force on the switch beam. The model is utilized in evaluating the switching time for uniform as well as non-uniform serpentine meander designs, considering different values of actuation voltage and a wide variation of switching parameters. This work takes into account the beam perforation, fringing field and stiffness effect simultaneously altogether. The results obtained for both the meander designs under every design specifications has been found out to be less than or approximately equal to 100 ls. These model based results are then compared with 3D FEM simulated values. Comparative Analysis indicated that the model results and simulation results are in close agreement with each other.
1 Introduction Over the last few decades, micro electromechanical system (MEMS) switches have become one of the trending research topics in electronic device designing. These switches are widely being used as a major signal processing component in advanced communication systems, defense applications, satellite systems, mobile phones, wireless modern technologies etc. (Liu et al. 2007; Newman 2002). The main reason for immense popularity of MEMS switches are low insertion loss, high isolation, low power consumption and high linearity as compared to conventional semiconductor switches such as PIN diode, FET etc. even at very high frequencies (Rebeiz 2003a; Shen et al. 2008). However, the major limitations of these switches are the requirement of high actuation voltages and slow switching speeds. Switching speed is an important performance parameter of MEMS switches for transmitting and receiving application. This switching speed depends on mass of the switch membrane and switch construction. This & K. Guha [email protected] 1
Department of Electronics and Communication, National Institute of Technology, Silchar, India
2
Micro Electronics Research Group, Department of ECE, KL University, Guntur, AP, India
switching speed can be increased by using a switch membrane with lower mass. To overcome these limitations, several techniques such as beams with low spring stiffness/constant, materials like AlSi0.04 (Guo et al. 2003), electromagnetic actuation with electrostatic actuation etc. have been used. But the use of materials like AlSi0.04 leads to much higher transmission losses. Also, switches with two actuation mechanisms requires complex fabrication process a
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