A novel microfluidics integrated biosensor based on a MEMS resonator
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TECHNICAL PAPER
A novel microfluidics integrated biosensor based on a MEMS resonator Mahnaz Mehdipoor1 • Habib Badri Ghavifekr1 Received: 22 February 2020 / Accepted: 6 May 2020 Ó Springer-Verlag GmbH Germany, part of Springer Nature 2020
Abstract In this paper a sensor based on MEMS resonators is proposed for digital microfluidics applications. The sensor system consists of a disk as active area immobilized for capturing any special particles. This disk can azimuthally vibrate by means of two in phase electrostatic actuators both sides. Two capacitive sensing elements determine the vibrating amplitude. The moving droplets by digital microfluidic module will envelope the disk of active zone, so the captured particles can change the vibration frequency of resonance. Due to azimuthal vibration, the fluidic damping is low enough to achieve measurable quality factor by resonator. The total system is simulated and the result is presented.
1 Introduction A large number of chemical and biosensors have been designed for microfluidics applications. One of the main categories of such sensors operates based on mechanical resonance principle. That includes ‘‘Quartz crystal microbalance: QCM’’ (Janshoff et al. 2000), ‘‘Surface Acoustic Wave: SAW’’ (Drafts 2000), ‘‘Bulk Acoustic Wave: BAW’’ (Cernosek et al. 1998) and micro cantilever beam (Wu et al. 2001). QCM sensors measure variation of mass by considering the change in frequency of a quartz crystal resonator. In SAW and BAW sensors, as frequency ranges from several hundred MHz to GHz, frequency shifts can be recorded resulting from exceptionally small mass loadings. Recently, MEMS-based resonators that open up a wide range of biomedical sensing because of high-quality factor, real time, small size and more convenient integration of electronic devices alongside are widely used (Abdolvand et al. 2016). Due to their small size, realizing a large number of coupled resonator array on a single chip is possible without any complexity. Such resonating arrays have been developed for various applications in food monitoring, environmental monitoring, and health care
& Mahnaz Mehdipoor [email protected] Habib Badri Ghavifekr [email protected] 1
Electrical Engineering Faculty, Sahand University of Tabriz, Sahand New Town, Iran
with high sensitivity and reliability (Spletzer et al. 2008). One of the most applicable type of that sensors is an artificial nose or electronic nose used to mimic the biological nose in detecting or distinguishing different types of materials or odors (Saad et al. 2008). In addition to mentioned application, it is also employed in space and military applications for autonomous mobile sensing systems and in environmental monitoring to monitor unpleasant or hazardous agents. Most of the coupled microresonator arrays (CMRA) are designed for applications in the gas environment, because the existing squeezing damping in oscillating structure affects the output signal of the system. The working principle of CMRA sens
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