A review on RF micro-electro-mechanical-systems (MEMS) switch for radio frequency applications
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REVIEW PAPER
A review on RF micro-electro-mechanical-systems (MEMS) switch for radio frequency applications Kurmendra1
•
Rajesh Kumar2
Received: 28 July 2020 / Accepted: 31 August 2020 Ó Springer-Verlag GmbH Germany, part of Springer Nature 2020
Abstract This paper is designed to review the MEMS switch by considering key aspects on the basis of mechanical structure, actuation methods, and types of contact and circuit configurations. The cantilevered and clamped–clamped switch structures are explored and discussed. Actuation methods and switch configurations have also been covered to give more insights about their placements and performances in RF systems. The electrostatic and piezoelectric actuation mechanisms can result in fast RF MEMS switches and better reliability but at the cost of increased pull-in voltage. The electrostatic method is mostly employed in MEMS switches due to its distinctive advantages. The resistive switch uses less actuation voltage compare to a capacitive switch but suffers from reliability issue. Nevertheless, the capacitive MEMS switches are prominent in use over ohmic contact switches due to better RF performance and reliabilities by offering lifetime of 3–10 million cycles. The RF MEMS switches can be placed in series, shunt and mixed configurations as per application requirements. Capacitive switches are mostly utilized in RF systems and placed in shunt with coplanar waveguide signal lines. These RF MEMS switches find applications in sensors, resonators, amplifiers, phase shifters, and MEMS satellite vehicles for space applications.
1 Introduction In the last two decades, RF MEMS technology has been developed enormously compared to other existing device technology (van Heeren and Salomon 2007; Dheringe and Rahane 2013). It has been possible due to the great performance of MEMS components at RF frequencies (Iannacci 2018; Premerlani et al. 2010). As suggested by Moore’s law, future devices will have numerous functional capabilities by integrating more components on the reduced chip area, and therefore, the smart and portable systems can be produced.Thus, a multifunctional device will have a miniaturized structure. MEMS is being regarded as ‘‘More than Moore’’ today by researchers (van Heeren 2006; Fang et al. 2013). The MEMS has been doing so from the last two decades since a micro& Kurmendra [email protected] 1
Department of Electronics & Communication engineering, Rajiv Gandhi University (A Central University), Doimukh, India
2
Department of Electronics & Communication engineering, NERIST, Nirjuli, India
electromechanical-system based device results in a miniaturized structure. Among all MEMS components, an RF MEMS switch is considered as one of the most useful components which results in miniaturized RF systems (Goel and Gupta 2019; Zheng and Papapolymerou 2004; Pal et al. 2015). The RF MEMS switches have replaced traditional switches such as PIN diode based switch and FET switches like HEMT and TFET switches from use in t
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