A Study of Silicon Suboxide thin Films by Photoluminescence

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A STUDY OF SILICON SUBOXIDE THIN FILMS BY PHOTOLUMINESCENCE a,b.c F. WANG a, D.M. WOLFE b, B.J. HINDS a and G. LUCOVSKY Department of Physics a,Materials Science b,Electrical and Computer Engineering North Carolina State University, P. 0. Box 8202, Raleigh, NC 27695 R. PLATZ and S. WAGNER Department of Electrical Engineering, Princeton University ABSTRACT Silicon suboxide (SiOx, 0

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