Adhesion Property of ITO Film on Polymer Treated by Linear Ion Source
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0936-L05-27
Adhesion Property of ITO Film on Polymer Treated by Linear Ion Source Shih Hsiu Hsiao, Yoshikazu Tanaka, and Ari Ide-Ektessabi Mechanical Engineering and Science, Kyoto University, Yoshida-Honmachi, Sakyo-ku, Kyoto, 606-8317, Japan ABSTRACT Indium oxide doped with tin oxide, ITO, has been extensively used as the transparent conductive electrode in display industry, and also been utilized on polymeric substrate for flexible display. The polymeric material used in flexible display has its flexibility and lightweight compared to glass-based substrate. However, it does not completely meet with the requirements in mechanical properties. The ion irradiations modify the polymeric surface that can be expected to improve its adhesion property. In this study, linear ion source was developed to treat the polymeric surface, and then ITO thin film was deposited by sputter deposition commonly utilized in display industry. Atomic Force Microscope was used to analyze the physical transformation of surface structure after the various argon and oxygen ion irradiated. Finally, the scratch testing showed the adhesive strength improved between ITO thin film and polymeric substrate when surface modified by optimum ion irradiation. Moreover, linear ion source provides the good uniformity of surface treatment and is very suitable for production-scale process. INTRODUCTION The flexible display means the display constructed of thin substrates can be bent or rolled to a radius of curvature without losing functionality. The transparent conductive electrodes deposited on glass substrates play the important role in display industry. Consequently, the robust flexible substrates with high quality transparent conductive electrodes are the key components for the flexible display. The various oxide materials have been experimented and used as transparent conductive electrodes in these years. However, ITO, Indium oxide doped with tin oxide, has been commonly used as the transparent conductive oxide in display industry, and it also can be utilized on polymer-based substrates for the flexible display. The polymeric substrate is flexible and lightweight compared to glass-based substrate used for display industry. Polymeric substrate has its high clarity and fine surface properties compared to glass. However, the polymeric material is easily deformed by surrounding temperature arisen, either in the process of physical
vapor deposition or chemical vapor deposition process. [1, 2] In this study, Polyethylene Terephthalate (PET) was used as the substrate material, and its surface was modified by the oxygen and argon ion of linear ion source. After that, ITO thin film was deposited by sputter deposition. [3] The measurement of the optical and electric properties of ITO thin film deposited on PET substrates was evaluated for display application. At last, the scratch testing was used to demonstrate the adhesion property improved between ITO thin film and polymeric substrates. EXPERIMENT Linear ion source was used for surface modification of PET s
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