Deposition of ITO Film on Ion Beam Treated Polymers
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Deposition of ITO Film on Ion Beam Treated Polymers Shih Hsiu Hsiao, Tetsuro Yamaguchi, Yoshikazu Tanaka and Ari Ide-Ektessabi Department of Mechanical Engineering and Science, Kyoto University Yoshida-Honmachi, Sakyo-ku, Kyoto, 606-8317, Japan ABSTRACT Indium oxide doped with tin oxide, ITO, is extensively used to fabricate transparent conductive coatings. ITO thin film on flexible substrates has been used in applications including touch panel contacts, electrodes for LCD and Plasma displays. ITO thin film can be deposited onto polymer substrates using electron-beam evaporation. Surface modification of polymer substrate improves its surface properties, adhesion in particular, to meet specific requirements while retaining the good mechanical properties of the substrates. In this study, a system consists of a linear ion beam and an electron beam which have been developed in vacuum. The linear ion beam treats the polymer surface while simultaneously the ITO thin film is deposited onto the surface using electron-beam evaporation. We demonstrated that polymer surface treated with the ion beam has been improved. Moreover, the linear ion beam source provides good uniformity of surface treatment and is very suitable for production-scale processes. An integrated electron-beam evaporation and linear ion beam system significantly increases the chemical compatibility of a polymer surface to an over-layer.
INTRODUCTION The simplest expression of flexible display is lighter weight and more shatter resistant. The flexibility means the displays constructed of thin substrates can be bend or rolled to a radius of curvature without losing functionality. Consequently, the robust flexible substrates with transparent conducting electrodes play the important role in flexible displays technology. The various materials have been developed and experimented for transparent conductive electrodes recently. However, ITO has been extensively used as the transparent conductive oxide in display industry, and it also can be utilized on polymer-based substrate or thin film glass for the flexible display. The polymers, used as the flexible substrates for the fundamental component of display, have their flexibility and lightweight compared to glass-based substrates. But polymers as the material used for flexible display require high clarity and fine surface properties. Moreover, it is important for the process of surface modification and deposition developed for ITO thin film on
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polymers substrate, according to the temperature limitation of polymeric material [1, 2]. A system consists the process of surface modified and the thin film deposited was developed to achieve the better surface properties of flexible substrate for display.
EXPERMENTAL A system consists of the linear ion source and the electron beam evaporation In this study, a system consists of a linear ion beam and an electron beam evaporation which have been developed in vacuum chamber. This cylinder-type chamber has the dimension of 250 mm in radius and
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