Advanced Control of Piezoelectric Micro-/Nano-Positioning Systems
This book explores emerging methods and algorithms that enable precise control of micro-/nano-positioning systems. The text describes three control strategies: hysteresis-model-based feedforward control and hysteresis-model-free feedback control based on
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Qingsong Xu Kok Kiong Tan
Advanced Control of Piezoelectric Micro-/NanoPositioning Systems
Advances in Industrial Control Series editors Michael J. Grimble, Glasgow, UK Michael A. Johnson, Kidlington, UK
More information about this series at http://www.springer.com/series/1412
Qingsong Xu Kok Kiong Tan •
Advanced Control of Piezoelectric Micro-/Nano-Positioning Systems
123
Kok Kiong Tan Department of Electrical and Computer Engineering National University of Singapore Singapore Singapore
Qingsong Xu Department of Electromechanical Engineering University of Macau Macau China
ISSN 1430-9491 Advances in Industrial Control ISBN 978-3-319-21622-5 DOI 10.1007/978-3-319-21623-2
ISSN 2193-1577
(electronic)
ISBN 978-3-319-21623-2
(eBook)
Library of Congress Control Number: 2015944753 Mathematics Subject Classification: 93, 93B12, 93B30, 93B52, 93C10, 93C40, 93C55, 93C57, 93C62, 93C73, 93C83, 93C85, 93C99, 93D05, 93D21, 68T40, 70Q05 Springer Cham Heidelberg New York Dordrecht London © Springer International Publishing Switzerland 2016 This work is subject to copyright. All rights are reserved by the Publisher, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilms or in any other physical way, and transmission or information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now known or hereafter developed. The use of general descriptive names, registered names, trademarks, service marks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. The publisher, the authors and the editors are safe to assume that the advice and information in this book are believed to be true and accurate at the date of publication. Neither the publisher nor the authors or the editors give a warranty, express or implied, with respect to the material contained herein or for any errors or omissions that may have been made. MATLAB® and Simulink® are registered trademarks of The MathWorks, Inc., 3 Apple Hill Drive, Natick, MA 01760-2098, USA, http://www.mathworks.com. LabVIEW™ is a trademark of National Instruments Corporation, 11500 N Mopac Expwy, Austin, TX 78759-3504, USA, http://www.ni.com/. Printed on acid-free paper Springer International Publishing AG Switzerland is part of Springer Science+Business Media (www.springer.com)
To Prof. Wei Zhao and my family for the encouragement all the time Qingsong Xu
To my family Kok Kiong Tan
Series Editors’ Foreword
The series Advances in Industrial Control aims to report and encourage technology transfer in control engineering. The rapid development of control technology has an impact on all areas of the control discipline. New theory, new controllers, actuators, sensors, new industrial processes, computer methods, new applications, new philosophies and, new chall
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