Advanced Interactive Personal Computer-Based Process Control Systems for Oxide MOCVD Systems.
- PDF / 1,177,924 Bytes
- 6 Pages / 414.72 x 648 pts Page_size
- 64 Downloads / 216 Views
Mat. Res. Soc. Symp. Proc. Vol. 415 ©1996 Materials Research Society
EXPERIMENTAL:
7
Data Process Corn puter for In-situ Monitoring & Feedback Control
Electronic Instrumentation
Main Control
Semiconductor Growth System
Figure 1. General hardware configuration diagram.
The overall hardware configuration for both systems is shown in Fig. 1. The most frequently used hardware configuration is an ISA bus based PC system. The interface boards consist of Analog Input Board (ND) with signal conditioning circuits, Analog Output boards (D/A) with digital I/O lines. The digital lines are buffered by solid state relay modules. This configuration has proven to be the most cost effective technique to meet all the requirements of speed and accuracy for CVD process control. The interface between the computer and system hardware can be in many formats. The DDE servers are -file Edit
02
Qperate Controls WOndows
lexi klel
4
Tihe RAwnwst 12,............. 13
SILICA WAVasme1111! swPSITIOe, -T, Status
iSystem 13
1
4 yt .
Lod,Safl i
..=
[..._.t.......Pau.........
[
.
•
NAlrm.Meo 9
W............
l
R _e Qut R•
Figure 2. Interactive mimic panel of the Wonder WareTm - Excelm Conot-l System. 168
Menu Help
1tif1Fz1F 7-AI; It '1ns Iz1iged, lFTl'lm T5JTI
,,,
open HeCipe I"-7
SaveRedpe SaveAs Exit
3 4 5 6 7 I I
I,
3
4,
5
65
OFF
OFF
IN
ON
ON
OFF
ON
OFF
t1 0.0 CN 5F02 0 00
RAMP VALVE3 OFF
5t 00 ON 50 0
0.0 .10 OF' 0.0 -1
00 0 ON 00 -.0
0,0 -1.0 ON 0.0 -1.0
10.0 20 OFF 100. 20
100 2.0 ON 10 .0 2.0
00 -10 OFF 0.0 -1.0
OFF
ON
ON
ON
OFF
ON
OFF
5.0
50
0.0
00
0.0
10.0 100
0.0
00 OFF 00
-10 ON 0.0
-1.0 ON 0.0
-10 ON 0.0
2.0 OFF 10.0
2,0 ON 10.0
-1.0 OFF 0.0
00
-10
-1.0
-1.0
2.0
2.0
-+0
ON 0.0 -10 ON 00 -19
ON 00 -1.0 ON
ON 0.0 -1.0 ON 0.0 -1.0
OFF 10.0 20 OFF 10.0 20
ON 10.0 2.0 ON 100 2.0
OFF 0.0 -1.0 OFF 00 -10
VALVE1 MFC RAMPI VALVE2
o-MC3
T1 RAMP3 0.0 T2 vALvE4 OFF 5.0 13 MFC4 0.0 14 RAMP FS VALVES 07 5.0 76 MFCS 17 RAMPS 0.0 I VALVEWSCP
i UFC6
t.O
2 RAMPS
0.0
2
OFF 50 0 ,0 OF' O 00
0.0 -1.0
Trend Anaiy.is Display a&(i
_ lerftvM Memunset
Red- Mass Flow
4
91we- Temaetsee
40.0-J o
200 0
&0
Msac
Wt0 OO10.
Tins.lee
Creatanewfecpo.
I
I
..
.
Figure 3. (a) Typical run layer data input screen and (b) typical trend analysis screen. used to transfer information between hardware I/O devices and Windows' software. Input/Output Hardware include PC mounted Analog Input Boards, Analog Output Boards, Digital Input Boards, Digital Output Board and all necessary conditioning circuits. A PLC is also a possible choice as the I/O device replacing internal cards. For networking, any common Ethernet board with cables is acceptable. The overall system hardware has been incorporated in and supported by a 486-66MHZ PC with a Super VGA monitor, 16 MB RAM, 520 MB Hard Disk, keyboard and mouse. WonderwareTu is an advanced process monitoring and control software for Microsoft Windows, which has a great flexibility of user interface design capabilities as exemplifie
Data Loading...
