Bench scale glass-to-glass bonding for microfluidic prototyping
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TECHNICAL PAPER
Bench scale glass-to-glass bonding for microfluidic prototyping Yafei Liu1,2 • Andrew Hansen2 • Rajib Krishna Shaha3 • Carl Frick3 • John Oakey2 Received: 12 February 2020 / Accepted: 17 March 2020 Ó Springer-Verlag GmbH Germany, part of Springer Nature 2020
Abstract Microfluidics, an increasingly ubiquitous technology platform, has been extensively utilized in assorted research areas. Commonly, microfluidic devices are fabricated using cheap and convenient elastomers such as poly(dimethylsiloxane) (PDMS). However, despite the popularity of these materials, their disadvantages such like deformation under moderate pressure, chemical incompatibility, and surface heterogeneity have been widely recognized as impediments to expanding the utility of microfluidics. Glass-based microfluidic devices, on the other hand, exhibit desirable properties including rigidity, chemically inertness, and surface chemistry homogeneity. That the universal adoption of glass-based microfluidics has not yet been achieved is largely attributable to the difficulties in device fabrication and bonding, which usually require large capital investment. Therefore, in this work, we have developed a bench-scale glass-to-glass bonding protocol that allows the automated bonding of glass microfluidic devices within 6 h via a commercially available furnace. The quality of the bonds was inspected comprehensively in terms of bonding strength, channel deformation and reliability. Additionally, femtosecond pulsed laser micromachining was employed to rapidly engrave channels on a glass substrate with arbitrarytriangular in this case-cross-section. Bonded glass microfluidic devices with machined channels have been used to verify calculated capillary entry pressures. This combination of fast laser micromachining that produces arbitrary cross-sectioned microstructures and convenient bench-scale glass bonding protocol will facilitate a broad range of micro-scale applications.
1 Introduction Microfluidic fundamentals and applications have generated substantial research interest in many fields, including fluid dynamics (Reece et al. 2015; Reece and Oakey 2016; Xu et al. 2017; Bidhendi et al. 2018; Liu et al. 2019), laboratory automation (Vestad et al. 2004; Zimmermann et al. 2007; Au et al. 2015), and biology and medicine (Brouzes et al. 2009; White et al. 2011; Sontheimer-Phelps et al. 2019). Microfluidic devices for research applications are often produced at the bench scale using affordable, accessible soft lithography techniques and materials (Duffy et al. 1998). Polydimethylsiloxane (PDMS) is the most common material used to fabricate microfluidic devices
& John Oakey [email protected] 1
Department of Petroleum Engineering, Xi’an Shiyou University, Xi’an, Shaanxi, China
2
Department of Chemical Engineering, University of Wyoming, Laramie, WY, USA
3
Department of Mechanical Engineering, University of Wyoming, Laramie, WY, USA
due to its ease of processing and handling, but other materials, su
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