Boehmische Physical Society Meets at IBMM '86
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temperature annealing of high-dose implants may provide clues to what is happening in the multilayers. The use of ion beams in growth and etching of thin films was discussed by several groups. An innovative technique for depositing thin isotopic films by decelerating a high voltage ion beam is starting to yield information on fundamental particlesolid interactions. Using the sensitivity of ion scattering to different isotopes, the film-to-substrate interface can be studied during subsequent ion beam mixing or annealing. Furthermore, the application of ion beams during or after thin film growth can modify the film adhesion, strain, density, chemical composition, electrical resistivity, index of refraction, and micros t r u c t u r e . The ability to induce these changes in a very controllable way makes ion beam modification not only an extremely useful technique for tailoring materials to specific applications but also an ideal research technique. The debate about using ion beams in VLSI technology continues with both camps (focused ion beams [FIBs] vs. masked ion beam lithography) making considerable progress. The Japanese are aggressively pursuing the FIB technology, and they reported 0.01-0.1 fjm beam diameters with currents of 100-300 pA and energies from 100-200 keV. Their dose rate is high, 1X10"3 A/cm , but they observe that the critical dose for amorphization is actually below that of conventional ion beams. Another speaker described a sophisticated system for ion projection lithography. The system
Boehmische Physical Society Meets at IBMM '86 Since its inception, the Boehmische Physical Society, the members of which all have interests in particle-solid interactions, has taken advantage of the occurrence of conferences in related fields to hold its gatherings. In this way, "a significant fraction of Boehmische members are able to attend without additional travel expense," according to B. Manfred Ullrich, secretary of the society. Meetings are usually held in the evening and consist of a keynote address by a prominent scientist followed by, or sometimescoincident with, the sampling of various regional wines and cheeses. Talks continued
S. Tom Picraux (Sandia National Laboratories) (left), 1987 MRS Fall Meeting Cochairman, receives a Boehmische award from Jim Mayer. MRS BULLETIN, JULY/AUGUST 1986, PACE 29
CONFERENCE REPORTS
Master of C e r e m o n i e s , Jim Mayer, o p e n s t h e m e e t i n g of t h e B o e h m i s c h e Physical Society at IBMM' 86. have ranged from s p u t t e r - i n d u c e d topology (R. Kelly) to h y d r o g e n in glasses [including b e e r glasses] (W. Lanford). At t h e I B M M '86 m e e t i n g in C a t a n i a on T u e s d a y e v e n i n g , J u n e 10, 1 9 8 6 , t h e p r e liminaries of t h e B o e h m i s c h e m e e t i n g r a n t r u e to f o r m . M a s t e r of c e r e m o n i e s , Jim M a y e r (Cornell University), appeared s p o r t ing a T - s h i r t a d o r n e d w i t h a profile caricat u r e of I B M M '86 c h a i r m a n E. Rimini. A m a s t e r of iconoc
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