Bonding in Ion-Implanted Carbon Films Characterized by TEM Spectrum Lines and Energy-Filtered Imaging
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SHaRE User Facility. Elemental distribution maps were also acquired by standard core-loss mapping EFTEM methods [3], and preliminary results were obtained for EFTEM mapping of the nt* / a* ratio.
EXPERIMENTAL Appropriate experimental conditions for producing elemental distribution maps and spectrum lines with a GIF interfaced to a Philips CM30 have been refined over several years on a range of materials [4]. Based on this experience, in the present work the following conditions were used: incident beam divergence a = 2.9 mrad, collection angle 0 = 4.8 mrad, probe current i >100 nA in -2 gim illuminated area, slit width for elemental mapping AE = 30 eV (10 eV for Si-L), exposure times of typically 5 s, 2x-binned 512 x 512 images, and TEM magnification -2000. The standard 3-window method was used for producing elemental maps with AE- background extrapolation; 2-window jump-ratio images were also produced [5]. Zero-loss (10) and unfiltered (IT) images were used to produce "thickness" maps of tA = ln(IT / I0) where X is the inelastic scattering mean free path (typically - 100nm). For TEM spectrum lines, 1024 x 256 images were used with dispersions of 0.2 or 0.3 eV/pixel, and exposure times typically
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