Crystallinity of Solution Deposited TiO 2 Films
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Crystallinity of Solution Deposited TiO2 Films Gregory. K. L. Goh, Institute of Materials Research and Engineering 3 Research Link, Singapore 117602, Singapore Email: [email protected] ABSTRACT Rutile and anatase TiO2 films were grown on glass substrates from acidic titanium precursor solutions from 60oC upwards. Anatase synthesized at 60oC had a crystallinity of 15% that increased to 54% for a growth temperature of 200oC. A similar crystallinity by conventional heat treatment of the 60oC material was attained only at 400oC. It is believed that more complete dehydration of titanium complexes at higher growth temperatures led to less disruption of the long range attractive forces required for the formation of the periodic crystalline lattice. Rutile films grown at 60oC were determined to have a refractive index of 2.4. This is lower than the bulk value of 2.65 because the as-synthesized rutile material was only 29% crystalline and also contained nano-sized pores. INTRODUCTION TiO2 films are important for photocatalytic applications such as self-cleaning, anti-fogging and solvent purification, and as switches and interferometers in optical communication devices. A simple and cost effective method for film growth is the use of low temperature (
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