Crystallization Kinetics of Rutile Formation from Amorphous Titania Films

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CRYSTALLIZATION KINETICS OF RUTILE FORMATION FROM AMORPHOUS TITANIA FILMS M.D. WIGGINS, M.C. NELSON, and C.R. AITA, Materials Department and The Laboratory for Surface Studies, University of Wisconsin-Milwaukee, P.O. Box 784, Milwaukee, WI 53201 ABSTRACT Titania films with two types of phase composition were sputter deposited on fused silica substrates: Type (I) amorphous+anatase+rutile and Type (I1) amorphous+rutile. These films were subjected to various annealing procedures in air. We studied three relevant transitions: 1) amorphous--crystalline (anatase and rutile) at temperature

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