Design and performance Analysis of PDMS Based Micropump
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Transactions on Electrical and Electronic Materials https://doi.org/10.1007/s42341-020-00200-4
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Design and performance Analysis of PDMS Based Micropump K. Srinivasa Rao1 · K. Chandrasekharam1 · S. Bandhavi Sai Sri1 · S. Suma1 · Md. Hamza1 · K. Grija Sravani1,2 Received: 15 November 2019 / Revised: 18 April 2020 / Accepted: 30 April 2020 © The Korean Institute of Electrical and Electronic Material Engineers 2020
Abstract This paper presents the design and performance analysis of MEMS based piezoelectrically actuated micropump for drug delivery systems. The proposed micropump have achieved a flow velocity and flow rate of 8.92 m/s and 0.854 mL/min respectively at 50 V when B aTiO3 is used as piezoelectric material. The micropump comprises of four elements: electrodes, piezoelectric layer, flexible membrane and a reservoir. The obtained flow rate for the micropump is best suitable in cardiovascular, hypertension cases where the drug need to be delivered with an appropriate flowrate. Keywords PDMS · Micropump · Flow Velocity · Flowrate · Bio-MEMS
1 Introduction MEMS technology is one of the most emerging technologies of the twenty-first century and has the potential to create tiny integrated circuits by incorporating silicon-based microelectronics with micromachining technology. These devices have gained more interest because of their miniature size, high performance, low response time and ability to consume less power [1]. MEMS devices have expanded to various domains like bio-medical applications [2, 3], radio-frequency operation switches [4–8], bio sensors [9, 10], automobile industry [11] etc. Navigation sensors [12], disk drive heads [13], blood pressure sensor [14–20], fiberoptic network components [21], glucose monitoring system [22] and munitions guidance are some of the applications of MEMS devices. Among them, drug delivery system is one of the innovative applications where the conventional drug delivery systems are replaced effectively. Delivery of drug into the patient’s body plays a predominant role in medical * K. Srinivasa Rao [email protected] * K. Chandrasekharam [email protected] 1
MicroElectronics Research Group, Department of ECE, Koneru Lakshmaiah Education Foundation (Deemed to be University), Green Fields, Vaddeswaram, Guntur 522502, India
National MEMS Design Center, Department of ECE, National Institute of Technology, Silchar, Assam 788010, India
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science. The action of the drug is beneficial only when it is delivered within a certain range, beyond the range creates toxic effects whereas beneath the range, the performance is negligible [23]. Prior to the invention of MEMS based drug delivery system various drug delivery processes were performed. Basic drug delivery process consists of oral medication using capsules. Even though the drug is sent into body in fixed proportions, there is no assurance that the drug will be carried to the specific part in definite proportions. Also, some drugs cannot survive the gastrointestinal environment which is
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