Development of micromachined flow sensor for drip infusion system
- PDF / 938,156 Bytes
- 7 Pages / 595.276 x 790.866 pts Page_size
- 70 Downloads / 198 Views
(0123456789().,-volV)(0123456789(). ,- volV)
TECHNICAL PAPER
Development of micromachined flow sensor for drip infusion system Chihiro Shimohira1 • Yoshihiro Hasegawa1 Tsutomu Kawabe2 • Mitsuhiro Shikida1
•
Kazuhiro Taniguchi1 • Miyoko Matsushima2
•
Received: 19 March 2020 / Accepted: 30 March 2020 Ó Springer-Verlag GmbH Germany, part of Springer Nature 2020
Abstract In this work, we developed a MEMS flow sensor for application to a drip infusion system. The MEMS sensor is composed of a silicone rubber layer, a film sensor with a flow rate measurement element consisting of a metal heater and thermistors formed on a thin polyimide film, and a PDMS layer with a flow channel that utilizes a plastic plate as a substrate. In the drip infusion system, the flow sensor needs to have high sensitivity in a low flow rate range under a low driving temperature condition in order to achieve high-precision drug delivery. Therefore, we utilized the calorimetric method as a flow rate measurement principle to improve the sensor sensitivity and set the driving condition of the sensor to 40 °C or less to prevent deterioration of the infusion drug. Experiments under these conditions showed that our flow sensor had high sensitivity in the low flow rate range of 5.0 g/min or less. We also evaluated the flow rate detection function using various liquids having the same properties as the drip infusion solution in the driving temperature of 40 °C or less and found that the flow sensor could sufficiently measure each solution within the set flow rate range.
1 Introduction With the development of Micro Electro Mechanical Systems (MEMS) technologies, various MEMS sensors have been commercialized and used in the industry. MEMS technology is advantageous in that low consumption can be achieved and multiple functions can be integrated by downsizing the sensor element (Muller et al. 1991; Ristic 1994; Senturia 2001; Gianchandani et al. 2008). Another advantage is that the cost can be reduced by batch processing using photolithography technology. Currently, pressure, acceleration, gyro, and microphone sensors are used for automobiles, smartphones, and wearable devices, but their applications are expanding to the social infrastructure and healthcare fields. In recent years, general users can easily obtain various sensors at low cost online, and anyone can build a MEMS sensor system by combining sensors with a single-board computer such as a Raspberry pi or Arduino. Furthermore, as the reliability of MEMS
& Yoshihiro Hasegawa [email protected] 1
Department of Biomedical Sciences, Hiroshima City University, Hiroshima, Japan
2
Department of Medical Technology, Nagoya University, Nagoya, Japan
sensors has been greatly improved (Idjeri et al. 2017; Yashdeep et al. 2017), the application of these sensors has expanded to the biotechnology field, for treating DNA and proteins, and to the medical field, where reliability is paramount (Chen et al. 2009; Gisela et al. 2001). On the medical front, infusion systems are one of the most freq
Data Loading...
