Diluted Magnetic Semiconductor Magneto-Optic Waveguides for Monolithic-Integration with Semiconductor Optic Devices

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ABSTRACT

We propose to use a paramagnetic diluted magnetic semiconductor Cdl.xIMnTe for magnetooptic waveguides, which can be integrated with semiconductor optic devices. Single crystal Cdl. ×MnxTe films are epitaxially grown on GaAs substrates by molecular beam epitaxy method. A good optical confinement is obtained in the waveguide by using a Cdi.yMnyTe clad layer with Mn concentration higher than that of the waveguide core layer. INTRODUCTION

An integrated optic circuit [1] originally means a circuit that contains all sort of optic devices such as laser, amplifier, switch, modulator, coupler, and electronic package. Such integrated optic circuit has not been achieved. Simpler optic circuits have been sufficient for practical purposes. But in future, demands for more reliable and more functional optic devices will require an integrated optic circuit in the original meaning. Magneto-optic waveguide devices, i.e., optical isolators and circulators, are indispensable components for the integrated optic circuits [2]. Up to now, the magnetic garnet films have been used for the magneto-optic

waveguide [3]. But these oxide films can not be grown on the semiconductor substrates. Recently, some attempts to integrate magneto-optic waveguides with semiconductor have been reported. Yokoi et al.[4] and Levy et al.[5] propose a direct bonding of magnetic garnet films onto semiconductor substrates. Hammer et al. [6] proposes a polycrystalline-metal-ferromagnetic optical waveguide isolator in which a semiconductor optical waveguide amplifier is combined with a ferromagnetic iron film. We propose to use epitaxial films of diluted magnetic semiconductors on semiconductor substrates as magneto-optic waveguide [7]. Diluted magnetic semiconductors (DMSs) [8] are semiconductors which contain large amounts of transition metal ions as substitutional elements. Cdl.xMnxTe (0

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