Direct Ion Beam Deposition of Diamond-Like Films from RF Inductively Coupled (IC) Plasma Source: Mechanical, Electrical, | IBOOK.PUB

Direct Ion Beam Deposition of Diamond-Like Films from RF Inductively Coupled (IC) Plasma Source: Mechanical, Electrical,

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ABSTRACT Diamond-like carbon (DLC) films were deposited on various substrates using direct ion beam deposition from an RF IC hydrocarbon plasma source. Combinations of gases such as CH 4 . CH 4 -N 2 were used to form plasma. The mechanical, electrical and optical properties of the films were examined as a function of deposition conditions and N 2 content in gas mixture. A small amount of N 2 (

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