Effect of Temperature on the Performance of an Ion-Sensitive Field-Effect Transistor-Type Chemical Sensor with Aluminum
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Effect of Temperature on the Performance of an Ion-Sensitive Field-Effect Transistor-Type Chemical Sensor with Aluminum Nitride Membrane Nadia Benattou
, Azzedine Hamid, Zoubir Ahmed Fouatih, Yacine Guettaf, Mohammed Hacene Hamid, and Chifaa Aber Submitted: 15 April 2020 / Revised: 11 October 2020 / Accepted: 31 October 2020
ISFET chemical sensors offer innovative solutions for the detection of chemical species by optimizing the ionosensitive membrane or layer between the aqueous medium and the insulation. As a result, the information provided by the sensor is no longer reliable. This is a major problem, as operators are often required to take measurements in an environment with higher or lower temperatures. The study of the effect of temperature on the detection parameters of the sensor, which are the surface potential, linearity and sensitivity, seems essential. The mathematical model presented in this article describes the physicochemical and thermal behavior of the sensor. First, it allows a series of simulations to be carried out on the variation in sensitivity, potential, and linearity with respect to the variation in pH. The second part of this work concerns the influence of temperature on the behavior of the sensor. Hence the determination of the temperature coefficient of the sensitivity, which is an indication of the performance of the sensor. It is also noted that the nature of the membranes of the sensors (Si3N4, Al2O3, SnO2) influences the temperature coefficient. Keywords
aqueous solution, chemical sensor ISFET, MOSFET, pH, potential, sensitivity, temperature, the AlN membrane, threshold voltage
1. Introduction In recent years, chemical sensors have been used in various fields, both applied and fundamental. Their applications are very diverse and address a wide variety of sectors, such as the food industry, home automation, health, pharmaceuticals, civil and military security, and the environment (Ref 1-3). For example, we can cite the detection of chemical species such as ionic concentrations, oxygen, and biological species for example enzymes or pH (Potential hydrogen) (Ref 4-7). ISFET (ion-sensitive fieldeffect transistor) sensors have generated major interest due to their small size, fast response, and low output impedance. Their major drawback is that they are subject to great thermal instability, thus affecting their performance and leading to inaccurate measurements (Ref 2, 8, 9). The aim of this article is to study the influence of temperature on the detection parameters of this type of sensor; we can cite the surface potential, the threshold voltage, the sensitivity, the linearity, and the response of the sensor. These parameters are first determined through numerical simulation by the resolution of nonlinear equations from the mathematical model Nadia Benattou, Zoubir Ahmed Fouatih, and Chifaa Aber, Universite´ des Sciences et de la Technologie dÕOran Mohamed Boudiaf, Bir El Djir, Oran, Algeria; Azzedine Hamid and Yacine Guettaf, Laboratoire dÕInstrumentation
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