Effect of ultraviolet-irradiation on peeling-induced formation of surface gratings on PMMA films

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Fuqian Yang Department of Chemical and Materials Engineering, University of Kentucky, Lexington, KY 40506

Sanboh Leea) Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 300, Taiwan (Received 14 December 2015; accepted 17 May 2016)

Using the peeling-induced splitting method, the effect of the irradiation of ultraviolet (UV) light on the formation of surface gratings on the surface of PMMA(Poly(Methyl Methacrylate))-based films is investigated at room temperature. The thickness of the PMMA-based films is in range of 236–534 nm, and the irradiation dose is in range of 0–5 J/cm2. Surface gratings are formed on the surface of the irradiated PMMA-based films. The spatial wave length is a linear function of the film thickness, independent of the UV doses used. The peeling-induced splitting process introduces compressive stress on the surface of the PMMA-based films, much larger than the corresponding surface energy. The magnitude of the apparent surface force increases with the increase of the film thickness. All the surface gratings formed have amplitudes approximately in the same range.

I. INTRODUCTION

There are great interests to construct surface structures on compliant substrates for potential applications in flexible electronics, photonics, microfluidics, etc. Various methods have been developed to form surface structures on the surface of polymers, including evaporation,1–3 electric field,4–6 nanoimprint,7–9 and surface instability.10–12 In general, these techniques can be divided into two categories: (i) contact-free fabrication techniques, and (ii) contact-controlled fabrication techniques. Among the contact-controlled fabrication techniques, the fracture-induced splitting has provided a unique method to construct structures on the surface of polymers via the splitting of polymer films.13,14 Pease III et al.15 produced sub-60-nm half-pitch highly ordered gratings over large surface area via the peeling-induced splitting of a polymer thin film sandwiched between two relatively rigid flat plates. They examined the effects of molecular weight, bonding strength between the polymer film and the plates, and temperature on the geometric characteristics of the surface structures formed. Cai and Newby16 created parallel silicone strips with spatial wavelengths larger than 10 lm from a silica layer on a silicon substrate. Using a tension-based splitting approach, Lin et al.13 and Liang et al.14 prepared submicron grating structures and semicircular surface patterns on the surface of Contributing Editor: Franz Faupel a) Address all correspondence to this author. e-mail: [email protected] DOI: 10.1557/jmr.2016.211 2004

J. Mater. Res., Vol. 31, No. 14, Jul 28, 2016

http://journals.cambridge.org

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PMMA(Poly(Methyl Methacrylate))-based polymeric films. They suggested that the residual surface stress created during the separation played an important role in determining the geometric characteristics of the surface patterns and derived a relationship between the spatial freque