Effects of Synthesis Parameters on CVD Molybdenum Disulfide Growth
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Effects of Synthesis Parameters on CVD Molybdenum Disulde Growth Gustavo A. Lara Saenz, Chandan Biswas, Hisato Yamaguchi, Claudia Narvaez Villarrubia, Aditya D. Mohite and Anupama B. Kaul MRS Advances / FirstView Article / July 2016, pp 1 - 6 DOI: 10.1557/adv.2016.484, Published online: 04 July 2016
Link to this article: http://journals.cambridge.org/abstract_S2059852116004849 How to cite this article: Gustavo A. Lara Saenz, Chandan Biswas, Hisato Yamaguchi, Claudia Narvaez Villarrubia, Aditya D. Mohite and Anupama B. Kaul Effects of Synthesis Parameters on CVD Molybdenum Disulde Growth. MRS Advances, Available on CJO 2016 doi:10.1557/adv.2016.484 Request Permissions : Click here
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MRS Advances © 2016 Materials Research Society DOI: 10.1557/adv.2016.484
Effects of Synthesis Parameters on CVD Molybdenum Disulfide Growth Gustavo A. Lara Saenz1, Chandan Biswas1,2, Hisato Yamaguchi3, Claudia Narvaez Villarrubia3, Aditya D. Mohite3 and Anupama B. Kaul*1,2 1
Electrical and Computer Engineering Department, University of Texas, El Paso, TX, U.S.A.
2
Metallurgical, Materials and Biomedical Engineering Department, University of Texas, El Paso, TX, 79968, U.S.A. 3
Materials Physics and Applications Division, Los Alamos National Laboratory, Los Alamos, NM, 87545, U.S.A. *E-mail: [email protected]
ABSTRACT Since the isolation of graphene, a monolayer of sp2-bonded carbon atoms arranged in a hexagonal lattice, two-dimensional (2D) layered materials have attracted a great deal of attention due to their outstanding mechanical, optical and electronic properties. The research areas of interest for these new materials include exploring their novel properties, developing scalable approaches to synthesize these materials, and integrating them into a new generation of nanodevices. The utilization of 2D materials in devices has many advantages, which includes scaled materials to the limit of atomic-scale membranes, and the potential to form device structures on flexible and transparent substrates, among others. Transition metal dichalcogenides (TMDs) monolayers in particular, have received increasing attention in recent years, especially molybdenum disulfide (MoS2), which is one of the most well explored semiconducting materials in the 2D materials system. In this work we present the synthesis of MoS 2 using chemical vapor deposition (CVD), where we have varied the synthesis parameters and compared the structure and quality of the CVD synthesized MoS2. At the same time, we have compared the characteristics with those obtained for mechanically exfoliated flakes from the bulk MoS2 crystal. The MoS2 quality has been analyzed using Raman spectroscopy.
INTRODUCTION One of the most investigated transition metal dichalcogenides (TMDs) is MoS2 which possess some interesting properties such as the transition from indirect band
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