Electrical Atomic Force Microscopy for Nanoelectronics
The tremendous impact of electronic devices on our lives is the result of continuous improvements of the billions of nanoelectronic components inside integrated circuits (ICs). However, ultra-scaled semiconductor devices require nanometer control of the m
- PDF / 23,233,117 Bytes
- 424 Pages / 453.544 x 683.151 pts Page_size
- 51 Downloads / 252 Views
Umberto Celano Editor
Electrical Atomic Force Microscopy for Nanoelectronics
NanoScience and Technology Series Editors Phaedon Avouris, IBM Research – Thomas J. Watson Research, Yorktown Heights, NY, USA Bharat Bhushan, Mechanical and Aerospace Engineering, The Ohio State University, Columbus, OH, USA Dieter Bimberg, Center of NanoPhotonics, Technical University of Berlin, Berlin, Germany Cun-Zheng Ning, Electrical, Computer, and Energy Engineering, Arizona State University, Tempe, AZ, USA Klaus von Klitzing, Max Planck Institute for Solid State Research, Stuttgart, Baden-Württemberg, Germany Roland Wiesendanger, Department of Physics, University of Hamburg, Hamburg, Germany
The series NanoScience and Technology is focused on the fascinating nano-world, mesoscopic physics, analysis with atomic resolution, nano and quantum-effect devices, nanomechanics and atomic-scale processes. All the basic aspects and technology-oriented developments in this emerging discipline are covered by comprehensive and timely books. The series constitutes a survey of the relevant special topics, which are presented by leading experts in the field. These books will appeal to researchers, engineers, and advanced students.
More information about this series at http://www.springer.com/series/3705
Umberto Celano Editor
Electrical Atomic Force Microscopy for Nanoelectronics
123
Editor Umberto Celano IMEC Leuven, Belgium
ISSN 1434-4904 ISSN 2197-7127 (electronic) NanoScience and Technology ISBN 978-3-030-15611-4 ISBN 978-3-030-15612-1 (eBook) https://doi.org/10.1007/978-3-030-15612-1 © Springer Nature Switzerland AG 2019 This work is subject to copyright. All rights are reserved by the Publisher, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilms or in any other physical way, and transmission or information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now known or hereafter developed. The use of general descriptive names, registered names, trademarks, service marks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. The publisher, the authors and the editors are safe to assume that the advice and information in this book are believed to be true and accurate at the date of publication. Neither the publisher nor the authors or the editors give a warranty, expressed or implied, with respect to the material contained herein or for any errors or omissions that may have been made. The publisher remains neutral with regard to jurisdictional claims in published maps and institutional affiliations. This Springer imprint is published by the registered company Springer Nature Switzerland AG The registered company address is: Gewerbestrasse 11, 6330 Cham, Switzerland
Contents
1
2
The Atomic Force Microscop
