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microtechnology and mems Series Editor: H. Fujita D. Liepmann The series Microtechnology and MEMS comprises text books, monographs, and state-of-the-art reports in the very active field of microsystems and microtechnology. Written by leading physicists and engineers, the books describe the basic science, device design, and applications. They will appeal to researchers, engineers, and advanced students.

Please view available titles in Microtechnology and Mems on series homepage http://www.springer.com/series/4526

Arno Lenk Rüdiger G. Ballas Roland Werthschützky Günther Pfeifer

Electromechanical Systems in Microtechnology and Mechatronics Electrical, Mechanical and Acoustic Networks, their Interactions and Applications With 313 Figures

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Professor Dr.-Ing habil Arno Lenk Dresden University of Technology Faculty of Electrical and Computer Engineering Helmholtzstraße 10 01069 Dresden Germany

Dr.-Ing Rüdiger G. Ballas Karl Mayer Textile Machinery Bruehlstr. 25 63179 Obertshausen Germany [email protected]

Professor Dr.-Ing habil Roland Werthschützky Darmstadt University of Technology Institute for Electromechanical Design Merckstr. 25 64283 Darmstadt Germany [email protected]

Professor Dr.-Ing habil Günther Pfeifer Dresden University of Technology Faculty of Electrical and Computer Engineering Helmholtzstraße 10 01069 Dresden Germany

ISSN 1615-8326 ISBN 978-3-642-10805-1 e-ISBN 978-3-642-10806-8 DOI 10.1007/978-3-642-10806-8 Springer Heidelberg Dordrecht London New York Library of Congress Control Number: 2010936071 c Springer-Verlag Berlin Heidelberg 2011  This work is subject to copyright. All rights are reserved, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilm or in any other way, and storage in data banks. Duplication of this publication or parts thereof is permitted only under the provisions of the German Copyright Law of September 9, 1965, in its current version, and permission for use must always be obtained from Springer. Violations are liable to prosecution under the German Copyright Law. The use of general descriptive names, registered names, trademarks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. Cover design: WMXDesign GmbH, Heidelberg Printed on acid-free paper Springer is part of Springer Science+Business Media (www.springer.com)

Preface

Within the wide field of technical information processing, electromechanical systems consisting of coupled electrical and mechanical functional elements have a significant importance. Both the design of interfaces between human and information processing mechanisms and the design of interfaces with the material process during metrological data acquisition and actuatory influence of process variables is made possible by these electromechanical systems.