Fabrication and Characterization in the Micro-Nano Range New Trends
This book shows an update in the field of micro/nano fabrications techniques of two and three dimensional structures as well as ultimate three dimensional characterization methods from the atom range to the micro scale. Several examples are presented show
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Series Editors Prof. Dr. Andreas Öchsner, Technical University of Malaysia, Skudai, Johor, Malaysia Prof. Dr. Holm Altenbach, University of Halle-Wittenberg, Halle, Germany Prof. Dr. Lucas Filipe Martins da Silva, University of Porto, Porto, Portugal
For further volumes: http://www.springer.com/series/8611
Fernando A. Lasagni Andrés F. Lasagni •
Editors
Fabrication and Characterization in the Micro-Nano Range New Trends for Two and Three Dimensional Structures
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Editors Dr. Fernando A. Lasagni Center for Advanced Aerospace Technologies Andalusian Foundation for Aerospace Development Seville Spain e-mail: [email protected]
Dr. Andrés F. Lasagni Fraunhofer Institute for Material and Beam Technology Dresden Germany e-mail: andres-fabian.lasagni@ iws.fraunhofer.de
and Metallurgy and Materials Engineering Group Department of Materials and Mechanical Engineering Seville University Seville Spain e-mail: [email protected]
ISSN 1869-8433
e-ISSN 1869-8441
ISBN 978-3-642-17781-1
e-ISBN 978-3-642-17782-8
DOI 10.1007/978-3-642-17782-8 Springer Heidelberg Dordrecht London New York Ó Springer-Verlag Berlin Heidelberg 2011 This work is subject to copyright. All rights are reserved, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilm or in any other way, and storage in data banks. Duplication of this publication or parts thereof is permitted only under the provisions of the German Copyright Law of September 9, 1965, in its current version, and permission for use must always be obtained from Springer. Violations are liable to prosecution under the German Copyright Law. The use of general descriptive names, registered names, trademarks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. Cover design: WMXDesign GmbH, Heidelberg Printed on acid-free paper Springer is part of Springer Science+Business Media (www.springer.com)
To our mother, Renata. In loving memory of our father, Norberto. We would like to dedicate this book to our beloved Inma (F.L.) and Nicole (A.L.), whose understanding, support, and encouragement made the completion of this book possible. This work is also dedicated to my son Marco (F.L.) and nephew (A.L.). Andrés Lasagni and Fernando Lasagni
Preface
Fabrication of two and three dimensional structures in the micro- and nanorange allows a new degree of freedom to the design of materials by tailoring desired material properties and in this way obtaining a superior functionality. Such complex designs are only possible by using novel fabrication techniques with high resolution, even in the nanoscale range. During the last years, different methods have emerged, allowing local modification of materials properties in two or threedimensions as well as the rational design of complex three dimensional architectures. In this way, i
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