Fabrication of Porous Nanostructured Thin Films For Microfluidic and Microarray Applications
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orous Nanostructured Thin Films For Microfluidic and Microarray Applications Louis Wentzel Bezuidenhout and Michael J. Brett MRS Proceedings / Volume 951 / 2006 DOI: 10.1557/PROC0951E1106
Link to this article: http://journals.cambridge.org/abstract_S1946427400049988 How to cite this article: Louis Wentzel Bezuidenhout and Michael J. Brett (2006). Fabrication of Porous Nanostructured Thin Films For Microfluidic and Microarray Applications. MRS Proceedings,951, 0951E1106 doi:10.1557/PROC0951E1106 Request Permissions : Click here
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Mater. Res. Soc. Symp. Proc. Vol. 951 © 2007 Materials Research Society
0951-E11-06
Fabrication of Porous Nanostructured Thin Films For Microfluidic and Microarray Applications Louis W. Bezuidenhout and Michael J. Brett Electrical and Computer Engineering, University of Alberta, Edmonton, T6G 2V4, Canada ABSTRACT The functionality of microfluidic and microassay devices could be enhanced through further development of porous engineered microstructures. New structural elements fabricated with porous nanostructured thin films deposited by the glancing angle deposition (GLAD) technique have been developed for these devices, and are reviewed here. With the GLAD technique, engineered structures such as vertical posts, slanted posts, helices, and square spirals can be directly grown inside microfluidic channels. A high surface area channel (517cm2/cm2) was made by depositing a silicon oxide porous film in glass microchannels (up to 4.5µm deep and 50µm wide). Similar channels were also fabricated by patterning channels in a photoresistcoated porous film. Self-sealed microchambers and channels were made by growing a SiO2 porous film on 14µm high silicon mesas (2.5x2.5µm, 7x7µm, and 25x25µm) and lines (2.5 to 50µm wide). Devices with channels containing periodic arrays of Si pillars with controllable porosity and architecture were fabricated with only one lithography and deposition cycle. The entire device was made by depositing a single GLAD porous film with areas of different porosity defining the channels. The channels, 200µm wide and 10.5µm deep, contained helical pillars with pore sizes ranging from 100nm-2µm, while a more dense nanofibrous helical film made up the remainder of the device. Fluid flow activated by negative pressure was demonstrated in this device, using both a dye solution and a 50nm microsphere solution. Material selection is not limited to silicon or silicon oxide, but may include a wide range of semiconductors, insulators and metals. A GLAD film was used to separate a test dye solution, demonstrating its potential for use in thin layer chromatography. The reported elements are suitable for a range of applications, including – but not limited to – chromatography, nano-assays and capillary electrophoresis. INTRODUCTION The field of microfluidics has experienced rapid growth and development since its first application in inkjet printing heads and early developments in microflow s
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