FIB Nanostructures
FIB Nanostructures reviews a range of methods, including milling, etching, deposition, and implantation, applied to manipulate structures at the nanoscale. Focused Ion Beam (FIB) is an important tool for manipulating the structure of materials at the nano
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Zhiming M. Wang Editor
FIB Nanostructures
Lecture Notes in Nanoscale Science and Technology
Volume 20
Series Editors Zhiming M. Wang State Key Laboratory of Electronic, Thin Film and Integrated Devices, University of Electronic Science and Technology, Chengdu, People’s Republic of China Andreas Waag Institut fur Halbleitertechnik, TU Braunschweig, Braunschweig, Germany Greg Salamo Department of Physics, University of Arkansas, Fayetteville, AR, USA Naoki Kishimoto Quantum Beam Center, National Institute for Materials Science, Tsukuba, Ibaraki, Japan Stefano Bellucci Laboratori Nazionali di Frascati, Istituto Nazionale di Fisica Nucleare Frascati, Italy Young June Park School of Electrical Engineering, Seoul National University, Shinlim Dong, Kwanak-Gu, Seoul, Korea
For further volumes: http://www.springer.com/series/7544
Zhiming M. Wang Editor
FIB Nanostructures
Editor Zhiming M. Wang State Key Laboratory of Electronic Thin Film and Integrated Devices University of Electronic Science and Technology Chengdu, People's Republic of China
ISSN 2195-2159 ISSN 2195-2167 (electronic) ISBN 978-3-319-02873-6 ISBN 978-3-319-02874-3 (eBook) DOI 10.1007/978-3-319-02874-3 Springer Cham Heidelberg New York Dordrecht London Library of Congress Control Number: 2013956620 © Springer International Publishing Switzerland 2013 This work is subject to copyright. All rights are reserved by the Publisher, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilms or in any other physical way, and transmission or information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now known or hereafter developed. Exempted from this legal reservation are brief excerpts in connection with reviews or scholarly analysis or material supplied specifically for the purpose of being entered and executed on a computer system, for exclusive use by the purchaser of the work. Duplication of this publication or parts thereof is permitted only under the provisions of the Copyright Law of the Publisher’s location, in its current version, and permission for use must always be obtained from Springer. Permissions for use may be obtained through RightsLink at the Copyright Clearance Center. Violations are liable to prosecution under the respective Copyright Law. The use of general descriptive names, registered names, trademarks, service marks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. While the advice and information in this book are believed to be true and accurate at the date of publication, neither the authors nor the editors nor the publisher can accept any legal responsibility for any errors or omissions that may be made. The publisher makes no warranty, express or implied, with respect to the material contained here
