FinFETs and Other Multi-Gate Transistors
FinFETs and Other Multi-Gate Transistors provides a comprehensive description of the physics, technology and circuit applications of multigate field-effect transistors (FETs). It explains the physics and properties of these devices, how they are fabricate
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Series on Integrated Circuits and Systems Series Editor:
Anantha Chandrakasan Massachusetts Institute of Technology Cambridge, Massachusetts
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Jean-Pierre Colinge Editor
FinFETs and Other Multi-Gate Transistors
Jean-Pierre Colinge Tyndall National Institute Cork, Ireland Series Editor: Anantha Chandrakasan Department of Electrical Engineering and Computer Science Massachusetts Institute of Technology Cambridge, MA 02139 USA
Library of Congress Control Number: 2007935904 ISBN 978-0-387-71751-7
e-ISBN 978-0-387-71752-4
Printed on acid-free paper. © 2008 Springer Science+Business Media, LLC All rights reserved. This work may not be translated or copied in whole or in part without the written permission of the publisher (Springer Science+Business Media, LLC, 233 Spring Street, New York, NY 10013, USA), except for brief excerpts in connection with reviews or scholarly analysis. Use in connection with any form of information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now known or hereafter developed is forbidden. The use in this publication of trade names, trademarks, service marks and similar terms, even if they are not identified as such, is not to be taken as an expression of opinion as to whether or not they are subject to proprietary rights. 9 8 7 6 5 4 3 2 1 springer.com
Preface
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