Fundamentals of Nanomechanical Resonators
This authoritative book introduces and summarizes the latest models and skills required to design and optimize nanomechanical resonators, taking a top-down approach that uses macroscopic formulas to model the devices. The authors cover the electrical and
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amentals of Nanomechanical Resonators
Fundamentals of Nanomechanical Resonators
Silvan Schmid • Luis Guillermo Villanueva Michael Lee Roukes
Fundamentals of Nanomechanical Resonators
123
Luis Guillermo Villanueva École Polytechnique Fédérale de Lausanne, Switzerland
Silvan Schmid Vienna University of Technology Vienna, Austria Michael Lee Roukes California Institute of Technology Pasadena, CA, USA
ISBN 978-3-319-28689-1 DOI 10.1007/978-3-319-28691-4
ISBN 978-3-319-28691-4 (eBook)
Library of Congress Control Number: 2016942892 © Springer International Publishing Switzerland 2016 This work is subject to copyright. All rights are reserved by the Publisher, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilms or in any other physical way, and transmission or information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now known or hereafter developed. The use of general descriptive names, registered names, trademarks, service marks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. The publisher, the authors and the editors are safe to assume that the advice and information in this book are believed to be true and accurate at the date of publication. Neither the publisher nor the authors or the editors give a warranty, express or implied, with respect to the material contained herein or for any errors or omissions that may have been made. Printed on acid-free paper This Springer imprint is published by Springer Nature The registered company is Springer International Publishing AG Switzerland
Preface
Back in December 1959, future Nobel laureate Richard Feynman gave a visionary and now oft-quoted talk entitled “There’s Plenty of Room at the Bottom.” The occasion was an American Physical Society meeting at the California Institute of Technology. Although he did not intend it, Feynman’s 7000 words were a defining moment in nanotechnology, long before anything “nano” appeared on the horizon. The breadth of Feynman’s vision is staggering. In that lecture 42 years ago, he anticipated a spectrum of scientific and technical fields that are now well established, among them electron-beam and ion-beam fabrication, molecular beam epitaxy, nanoimprint lithography, atom-by-atom manipulation, quantum-effect electronics, spin electronics (also called spintronics), and microelectromechanical systems (MEMS) or, even smaller, nanoelectromechanical systems (NEMS). It is the latter topic which has been the focus of our research careers: mechanical systems with at least one dimension below 1 m (106 m) where the number of atoms departs from what is usually considered macroscale and enters into the mesoscale. NEMS have been developed for a bit more than two decades now. Fabrication technology has e
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