Nano Carbon 1D and 2D Nanomechanical Resonators
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Nano Carbon 1D and 2D Nanomechanical Resonators Jaesung Lee1*, Philip X.-L. Feng1*, and Anupama B. Kaul2* 1
Electrical Engineering, Case Western Reserve University, Cleveland, OH 44106, USA Jet Propulsion Laboratory, California Institute of Technology, Pasadena, CA 91109, USA * Emails: [email protected]; [email protected]; [email protected]
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ABSTRACT We demonstrate one-dimensional (1D) and two-dimensional (2D) resonant nanoelectromechanical systems (NEMS) derived from nano carbon materials, where the resonance frequency and the quality (Q) factor of the devices are measured experimentally using ultrasensitive optical interferometry. The 1D nano carbon resonators are formed using carbon nanofibers (CNFs) which are synthesized using a plasma-enhanced chemical vapor deposition (PECVD) process, while the 2D nanocarbon resonators are based on CVD grown graphene. The CNFs are prototyped into few-µm-long cantilever-shaped 1D resonators, where the resonance frequency and Qs are extracted from measurements of the undriven thermomechanical noise spectrum. The thermomechanical noise measurements yield resonances in the ~315 MHz range, with Q of ~200800. Significant changes in resonance characteristics are observed due to electron beam induced amorphous carbon deposition on the CNFs, which suggests that 1D CNF resonators have strong prospects for ultrasensitive mass detection. We also present NEMS resonators based on 2D graphene nanomembranes, which exhibit robust undriven thermomechanical resonances for the extraction of ultrasmall strain levels. INTRODUCTION Nanoelectromechanical systems (NEMS) are gaining increasing attention as viable alternatives for beyond-CMOS architectures, for enabling zero-leakage, ultralow-power, abrupt switching devices due to their inherently mechanical construction [1]. Such nanomechanical structures also offer advantages as electronic components operational in harsh environments, such as highradiation and high-temperatures, in contrast to conventional solid-state devices which are more vulnerable to failure in hostile environments. In addition to their utility as potential beyondCMOS switches, dynamical and resonant properties of NEMS has allowed these characteristics to be exploited for various sensing applications, such as mass sensing [2], force detection [3], and measurements in the quantum-mechanical regime [4]. While many materials have been explored for NEMS devices including conventional materials such as Si [5] and SiC [6], carbon-based materials have also been noted as another promising candidate for NEMS. Nano carbons, such as graphene [7], carbon nanotubes (CNTs) [8,9,10], and carbon nanofibers (CNFs) [11,12], exhibit ultralow density and an exceptionally high Young’s modulus. Coupled with their high-elasticity and mechanical resilience, nano carbon materials appear to be ideally suited for enabling high-performance, high-longevity NEMS resonators. In this paper, we present results on NEMS resonators enabled by two nano carbon materials, 1D CNFs and 2D graphene. In the
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