• PDF / 240,430 Bytes
• 6 Pages / 432 x 648 pts Page_size
• 19 Downloads / 236 Views

DOWNLOAD

REPORT

MRS Advances © 2016 Materials Research Society DOI: 10.1557/adv.2016.144


       
 !!"#$%
 
  






 




 
!"
 !& !'


 
""
#
#
"

 


 $%




& '
(
(


)"

&) )' 
&*+,-'
)

$
)
(

#.

"/
*

"
(.

 $%
0 

)")


)
1
.)
 
23 
" 
 $%

#

)
"))
 
#



 $%
/
*
))
 
 

 

#

 $%
 
)"
"


%
)


#
)
(
4
" 
""/

#
)
 


)"
))

 

(/

 

""



)

 

(

(
"

)
 
"
5.
 

 
 $))
"/
* 


*+,-
)
")
$
)

 
 )
)


#
(
))

)/

() #*'( )
-
#
"
"

)






)



67 
)
).
8 9/
%$)
)
)

)

)
)()
"



)"
&-7+'
"
 

$
)

)

"
#
"
 5


)
 :

)
/


 
""
#
#
"

 
"




& $%'



(

#"


8;&1' 9?3 @'
#
)

$) 


)()
&) ' 
&*+,-'



$)
 
/


 #

 
.#


"
)
-7+

&A--7+'/
* 



 
#.
"

)
5
(
)
.
-7+
 (/
A

)"


$)
 



(
 

(
#

))
#
  
)
 
 

(
#
 )





.
)

$)/

A--7+


"

# 

"

"")



 (


)


("
)
$)

"/
*
&) '

&*+,-'

)

 
"


$)
 

)
$)


 
A--7+

)

(
 
)

$

"
/
* 
-7+



311

Downloaded from https://www.cambridge.org/core. Cambridge University Main, on 10 Oct 2018 at 06:07:12, subject to the Cambridge Core terms of use, available at https://www.cambridge.org/core/terms. https://doi.org/10.1557/adv.2016.144




Recommend Documents

Ozone-Based Atomic Layer Deposition of HfO 2 and Hf x Si 1-x O 2 and Film Characterization

203 117 527KB

Tunable Workfunction with TaN Metal Gate on HfO 2 -Hf x Si y O Dielectrics

157 100 56KB

Atomic Layer Deposition of HfO 2 Thin Films on Si and GaAs Substrates

227 34 156KB

Thin Film Growth of High Tc Superconductors by Microwave Plasma Assisted Reactive Evaporation

140 78 2MB

Heteroepitaxial Si 1-x-y Ge x C y Layer Growth on (100)Si by Atmospheric Pressure Chemical Vapor Deposition

179 57 2MB

Characterization of Atomic Layer DepositedWN x C y Thin Film as a Diffusion Barrier for CopperMetallization

181 16 2MB

Fabrication of Si 1-x Ge x layer on Si substrate by Screen-Printing

177 33 449KB

Effects of an Al 2 O 3 capping layer on La 2 O 3 deposited by remote plasma atomic layer deposition

199 120 1MB

Atomic layer deposition of HfO 2 , Al 2 O 3 , and HfAlO x using O 3 and metal(diethylamino) precursors

261 81 830KB

Nucleation Studies of HfO 2 Thin Films Produced by Atomic Layer Deposition

204 48 353KB

Direct Growth of AIN Thin Layer on (111)Si Substrate by RF-MBE

183 2 1MB

Atomic layer deposition of epitaxial HfO 2 thin films on r -cut sapphire

261 43 869KB