Ion Assisted Reaction In Polymer And Ceramics
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between the metal electrode and the substrate often induces device failure. Adhesion strength is closely related to hydrophilic surface in metal/polymer system [7]. So, PVDF was also modified by the IAR to improve adhesion strength and the relation between the adhesion strength and the hydrophilic surface was investigated. The IAR process also is applied to modify AIN ceramics and the effect of the IAR treatment was also surveyed by measuring the adhesion strength. EXPERIMENT The ion assisted reaction system consists of a conventional ion beam system, a reactive gas introducing system, an ion gun, and a sample holder. A cold hollow type ion gun has been used in the system. The ion energies were adjusted from 0.5 to 1.2 keV, and current of ion beam controlled by discharge voltage and current. The amount of ion irradiating the specimen was measured by a Faraday cup biased -24 voltage to remove the secondary electron, and was controlled by changing the exposure time at fixed ion beam current. Reactive gases were blown from 0 to 8 mi/min during the ion beam irradiation. More detail experimental system and methods such as sample preparation, wetting angle measurement, x-ray photoelectron spectroscopy (XPS), etc., were described in detail elsewhere [2-4]. Relation between wettable PS petri-dish surface and cell growth was investigated by growing the rat pheochromocytoma cell (PC 12 cell). The PC 12 cell has property to adhere very poorly to surface of plastic dish, thus shows difficulties to grow on the PS petri-dish without any treatment. The PC 12 cells were seeded in RPMI1640 media which contains 5% fetal bovine serum and 10% horse serum, and cultured in the incubator with 5% CO2 . The growth of the PC12 cell was compared by counting the number of cells from each group in every 24 hour for 6 days. Counting the number of cells were performed as follows; The media were removed by aspiration and cells were rinsed with phosphate buffered saline (pH 7.3). The cells were detached from the PS petridishes by incubating with trypsin solution (GIBCO) for 5 min. at 37'C. Cell suspensions were pipetted several times to obtain single cell to count. Then, the cell suspensions were diluted with media and counted the number of cell by optical microscope using hematocytometer. Adhesion between PVDF and Pt was tested by boiling methods. Pt/PVDF samples were dipped into water and boiled at 100°C for 4 hours and subsequently cooled by dipping into the tap water. After cooling, the surfaces of Pt/PVDF samples were examined by optical microscope. AIN ceramics was also modified by the JAR. The characteristics of modified ceramic surface was studied by XPS. Cu film was deposited on modified ceramics and adhesion between Cu film and ceramics was investigated by scratch test. RESULTS Figures 1(a) and (b) show changes of the contact angles of the PS and PVDF as a function of irradiating ion dose with and without blowing oxygen gas at the acceleration voltage of 1.0 kV, respectively. As shown in Fig. 1(a), the contact angles of specimens irradi
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